In situ self-calibration of atomic force microscopy

Nanotechnology

Volumn 9, Issue 2, 1998, Pages 72-76

  Kweon, Hyun Kyu ^a   Gao, Wei ^a   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CALIBRATION; COMPUTER SIMULATION; PIEZOELECTRIC DEVICES; SERVOMECHANISMS;

SERVO PIEZOELECTRIC ELEMENTS; Z DIRECTIONAL DISTORTION;

ATOMIC FORCE MICROSCOPY;

EID: 0032092115     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/9/2/006     Document Type: Article

References (8)

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