Materials property dependence of the effective electromechanical coupling coefficient of thin film bulk acoustic resonators

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2005, Pages 11-17

  Chen, Qingming ^a   Shun, Tongying ^a   Wang, Qing Ming ^a  

^a University of Pittsburgh   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

THICKNESS RATIO; TRANSFER MATRIX METHOD;

ACOUSTIC WAVES; COUPLED CIRCUITS; ELECTRIC IMPEDANCE; ELECTRODES; MATRIX ALGEBRA; PIEZOELECTRIC MATERIALS; THIN FILMS;

ELECTROMECHANICAL DEVICES;

EID: 28744455002     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Y. Zhang, "Resonant spectrum method to characterize piezoelectric film in composite resonators", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 50, 321-333, 2003
2. Y. Zhang, "Direct characterization of ZnO films in composite resonators by the resonance spectrum method", IEEE Ultrasonics Symposium, 991-994,1999
3. "IEEE Standard on Piezoelectricity 176-1987." Available from IEEE Customer Service, Piscataway, NJ
4. K. M. Lakin, "Fundamental properties of thin film resonators", 1991 Frequency Control Symposium Proc., pp.201-206
5. A. H. Meitzler and E. K. Sittig, "Characterization of piezoelectric transducers used in ultrasonic devices about 0.1GHz", J. of Appl. Phys., Vol. 40(11), pp.4341-4352, 1969
6. E. K. Sittig, "Effects of bonding and electrode layers on the transmission parameters of piezoelectric transducers used in ultrasonic digital delay lines", IEEE Trans. Sonics and Ultrasonics, Vol. 16(1), pp. 2-10, 1969
7. E. K. Sittig, "Design and technology of piezoelectric transducers for frequencies above 100MHz", Physical Acoustics, Vol. IX, Edts. W.P. Mason and R.N. Thurston, pp. 221-275, Academic Press, New York, 1972
8. F. Shen, P. Lu, S. J. O'Shea, K. H. Lee and T. V. Ng, Thermal effects on coated resonant microcantilevers, Sensors and Actuators A 95 (2001), pp17-23.