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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 A, 2002, Pages 4620-4621

Nano-indentation hardness and elastic moduli of bulk single-crystal AlN

(3) Yonenaga, Ichiro a Shima, Toshiyuki a Sluiter, Marcel H F a

a TOHOKU UNIVERSITY (Japan)

Author keywords

Aluminum nitride; Elastic moduli; Hardness; Nano indentation

Indexed keywords

CHEMICAL POLISHING; ELASTIC MODULI; FILM GROWTH; HARDNESS; INDENTATION; MECHANICAL TESTING; PHASE TRANSITIONS; POISSON RATIO; SILICON; SINGLE CRYSTALS; SUBSTRATES;

CONTINUOUS DEPTH-SENSING MODE; LOAD-DISPLACEMENT CURVE; NANO-INDENTATION HARDNESS; SINGLE CRYSTAL ALUMINUM NITRIDE;

ALUMINUM NITRIDE;

EID: 0036655899 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.4620 Document Type: Article

Times cited : (80)

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