Thin film NiTi shape memory alloy microactuator with two-way effect

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 89-95

  Gill, John J ^a   Carman, Gregory P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY ALLOYS; COPPER ALLOYS; DEIONIZED WATER; HYDROFLUORIC ACID; MEMS; SHAPE MEMORY EFFECT; SILICON WAFERS; THIN FILMS; TITANIUM ALLOYS;

LARGE STRAINS; MAXIMUM DEFLECTION; MICROELECTROMECHANICAL SYSTEMS ACTUATORS; NICKEL-TITANIUM; NICKEL-TITANIUM SHAPE MEMORY ALLOYS; SHAPE MEMORY ALLOY ACTUATORS; THIN-FILM SHAPE MEMORY ALLOYS; THIN-FILMS; TITANIA MEMBRANES; TWO WAYS;

MICROACTUATORS;

EID: 0242531963     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1076     Document Type: Conference Paper

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