Nucleation and growth of copper on mesoporous silicon by immersion plating

Journal of Physics D: Applied Physics

Volumn 40, Issue 9, 2007, Pages 2864-2869

  Kumar, Pushpendra ^a   Huber, Patrick ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; EPILAYERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MESOPOROUS MATERIALS; NUCLEATION; POROUS SILICON; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

COPPER DEPOSITION; IMMERSION PLATING; TRANSMITTANCE MODE;

COPPER;

EID: 34247526922     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/9/030     Document Type: Article

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