Fabrication of porous membrane filter from p-type silicon

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 8, 2005, Pages 1624-1628

  Grigoras, K ^a   Franssila, S ^a   Sikanen, T ^b   Kotiaho, T ^c   Kostiainen, R ^b  

^a AALTO UNIVERSITY   (Finland)

^b Discovery Technology   (Finland)

^c UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

DIMETHYL SULFOXIDE; FILTER ACTION; ORGANIC ELECTROLYTES;

ANODIC OXIDATION; CRACK INITIATION; ELECTROLYTES; ETHANOL; FABRICATION; NITRIDES; POLYSTYRENES; POROUS MATERIALS; WATER;

POROUS SILICON;

EID: 25444438477     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200461203     Document Type: Conference Paper

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