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Volumn 13, Issue 2, 2007, Pages 277-282

A silicon micromachined f-θ microlens scanner array by double-deck device design technique

Author keywords

Microelectromechanical system (MEMS); Microlens; Optical cross connect (OXC); Topologically layer switching architecture; XY stage

Indexed keywords

COULOMB INTERACTIONS; MEMS; MICROMACHINING; OPTICAL SYSTEMS; SCANNING; SILICON; SILICON ON INSULATOR TECHNOLOGY; SUSPENSIONS (COMPONENTS);

EID: 34247500838     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2007.893099     Document Type: Article
Times cited : (21)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.