An electrostatic inertia-driven micro rover

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 395-398

  Mita, Makoto ^a   Toshiyoshi, Hiroshi ^b   Fujita, Hiroyuki ^b  

^a JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC DRIVES; ELECTRIC MOTORS; FRICTION; OPTIMIZATION; SILICON; SUSPENSIONS (FLUIDS);

ELECTROSTATIC IMPACT MOTION; ELECTROSTATIC INERTIA-DRIVEN MICRO ROVERS; INTERTIA-MASS DISTRIBUTION; STATIC FRICTION;

ELECTROSTATICS;

EID: 26844538159     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. M. Mita, et al., "Electrostatic Impact-drive Actuator", IEEE MEMS 2001, 21-25 Jan 2001, Interlaken, Switzerland pp.590-593.
3. M. Mita, et al., "A Micromachined Impact Microactuator Drive by Electrostatic Force" IEEE. Jour. MEMS
4. M. Mita, et al., "Multi-height HARMS by Planar Photolithography on Initial Surface," HARMST '99, 13-15 June, 1999, Chiba, Japan
5. M. Mita, et al., "Multiple-height, Microstructures Fabricated by ICP-RIE and Embedded Masking Layers", Trans. IEEJ dept E, Nov. 2000, pp. 493-497.
6. Kimitake Fukushima, Daisuke Saya, and Hideki Kawakatsu, "Development of a Versatile Atomic Force Microscope within a Scanning Force Microscope' ', Japan Journal of Applied Physics, Vol.39 pp.3747-3749
7. K. Fukushima, D. Saya, and H. Kawakatsu, "Development of SEM-AFM for measurement of 3D nano-structures", Proc. of The 8th International Colloquium on Scanning Probe Microscopy and Asian SPM 3, p.57, 2000.12