Fabrication of precision 3D microstructures by use of a combination of ultraprecision diamond turning and reactive ion etching process

Journal of Micromechanics and Microengineering

Volumn 17, Issue 5, 2007, Pages 883-890

  Chen, Yang ^a   Li, Lei ^a   Yi, Allen Y ^a  

^a Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION MOLDING; DIAMONDS; LITHOGRAPHY; REACTIVE ION ETCHING; SERVOMECHANISMS; SILICON WAFERS; TURNING;

PHOTORESIST LAYER; SERVO CONTROL; ULTRAPRECISION MACHINING PROCESS; WAFER SUBSTRATES;

MICROSTRUCTURE;

EID: 34247487391     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/5/006     Document Type: Article

References (17)

1. Kovacs G T A, Maluf N I and Petersen K E 1998 Bulk micromachining of silicon Proc. IEEE 86 1536-51
2. Beuret C, Racine G-A, Gobet J, Luthier R and de Rooij N F 1994 Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems pp 81-5
3. Waits C M, Modafe A and Ghodssi R 2003 Investigation of gray-scale technology for large area 3D silicon MEMS structures J. Micromech. Microeng. 13 170-7
4. Morgan B, Waits C M, Krizmanic J and Ghodssi R 2004 Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching J. Microelectromech. Syst. 13 113-20
5. Waits C M, Morgan B, Kastantin M and Ghodssi R 2005 Microfabriction of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching Sensors Actuators 119 245-53
6. Totsu K, Fujishiro K, Tanaka S and Esashi M 2005 Gray-scale lithography using mask-less exposure system 13th Int. Conf. on Solid-State Sensors pp 1441-4
7. Bourounia T, Masuzawa T and Fujita H 2004 The MEMSNAS process: microloading effect for micromachining 3D structures of nearly all shapes J. Microelectromech. Syst. 13 190-9
8. Zhang X, Jiang X N and Sun C 1999 Micro-stereolithography of polymeric and ceramic microstructures Sensors Actuators 77 149-56
9. Kawai T, Sawada K and Takeuchi Y 2001 Ultra-precision micro structuring by means of mechanical machining 14th IEEE Int. Conf. on Micro Electro Mechanical Systems (2001 MEMS)
10. Yi A Y and Li L 2005 Design and fabrication of a microlens array by use of a slow tool servo Opt. Lett. 30 1707-9
11. Li L, Yi A Y and Huang C et al 2006 Fabrication of diffractive optics by use of a slow tool servo diamond turning process Opt. Eng. 45 113401
12. Hopcroft M, Kramer T, Km G, Takashima K, Higo Y, Moore D and Brugger J 2005 Micromechanical test of SU-8 cantilevers Fatigue Fracture Eng. Mater. Struct. 28 735-42
13. Yu H, Balogun O, Li B, Murray T W and Zhang X 2006 Fabrication of three-dimensional microstructures based on singled-layered SU-8 for lab-on-chip application Sensors Actuators A 127 228-34
14. 2 plasmas Appl. Phys. Lett. 46 1050-2
15. 2 plasma J. Vac. Sci. Technol. B 22 202-11
16. Jain A and Yi A Y 2005 Compression molding of aspherical glass lenses-a combined experimental and numerical analysis J. Am. Ceram. Soc. 88 579-86
17. Jain A and Yi A Y 2005 Numerical modeling of viscoelastic stress relaxation during glass lens forming process. J. Am. Ceram. Soc. 88 530-5