Ultra-precision micro structuring by means of mechanical machining

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 22-25

  Kawai, Tomohiko ^a   Sawada, Kiyoshi ^a   Takeuchi, Yoshimi ^b  

^a Tokyo Institute of Technology   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INJECTION MOLDING; MICROMACHINING; MICROSTRUCTURE; PHOTOLITHOGRAPHY; PLASTICS INDUSTRY; SURFACE ROUGHNESS;

FRICTION FREE MACHINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035016995     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906469     Document Type: Article

References (0)