Compositional analysis of Si nanostructures: SIMS-3D tomographic atom probe comparison

Semiconductor Science and Technology

Volumn 22, Issue 1, 2007, Pages

  Thompson, K ^a   Bunton, J H ^a   Moore, J S ^b   Jones, K S ^b  

^a Imago Scientific Instruments   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; TOMOGRAPHY;

3D ATOM PROBE TOMOGRAPHY (APT); COMPOSITIONAL ANALYSIS; ROUGHNESS MEASUREMENTS;

NANOSTRUCTURES;

EID: 34247242651     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/1/S30     Document Type: Article

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