Site-specific lift out sample preparation technique for atom probe analysis

Microscopy and Microanalysis

Volumn 12, Issue SUPPL. 2, 2006, Pages 1742-1743

  Lawrence, D ^a   Thompson, K ^a   Larson, D ^a   Gorman, B ^b  

^a Imago Scientific Instruments   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750878739     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927606064099     Document Type: Conference Paper

References (5)

1. K. Thompson, J.H. Booske, D.J. Larson, T.F. Kelly, Appl. Phys. Lett. 87(5) 2005.
2. L.A. Giannuzzi, R. Geurts, J. Ringnalda, Microscopy & Microanalysis 1192 (2005) 828.
3. D.J. Larson, et al, Microscopy and Microanalysis 7, (2001) 24.
4. M.K. Miller, et al, Strategies for Fabricating Atom Probe Specimens with a Dual Beam FIB Ultramicroscopy, 102 (2005) 287-298
5. K. Thompson, B. Gorman, D. J. Larson, B. van Leer, L. Hong, "Minimization of Ga Induced FIB Damage Using Low Energy Clean-up" this Proceeding.