Tuning the dynamic behavior of parametric resonance in a micromechanical oscillator

Applied Physics Letters

Volumn 82, Issue 1, 2003, Pages 130-132

  Zhang, Wenhua ^a   Baskaran, Rajashree ^a   Turner, Kimberly ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC POTENTIAL; ELECTROSTATICS; FREQUENCY RESPONSE; PERTURBATION TECHNIQUES; RESONANCE; TUNING;

MICROMECHANICAL OSCILLATORS;

PARAMETRIC OSCILLATORS;

EID: 0037421385     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1534615     Document Type: Article

References (15)

1. C. T. C. Nguyen, Smart Structures and Materials 1999: Smart Electronics and MEMS, Newport Beach, California, 1-3 March 1999 (SPIE, Bellingham, WA, 1999), p. 55.
2. B. Ilic, D. Czaplewski, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt, Appl. Phys. Lett. 77, 450 (2000).
3. M. K. Baller, H. P. Lang, J. Fritz, C. Gerber, J. K. Gimzewski, U. Drechsler, H. Rothuizen, M. Despont, P. Vettiger, F. M. Battiston, J. P. Ramseyer, P. Fornaro, E. Meyer, and H. J. Guntherodt, International Conference on Scanning Probe Microscopy, Cantilever Sensors and Nanostructures, Seattle, Washington, 30 May-1 June 1999 (Elsevier, Netherlands, 2000), p. 1.
4. T. D. Stowe, K. Yasumura, T. W. Kenny, D. Botkin, K. Wago, and D. Rugar, Appl. Phys. Lett. 71, 288 (1997).
5. T. Kenny, IEEE Sens. J. 1, 148 (2001).
6. D. Rugar, C. S. Yannoni, and J. A. Sidles, Nature (London) 360, 563 (1992).
7. K. L. Turner, S. A. Miller, P. G. Hartwell, N. C. Macdonald, S. H. Strogartz, and S. G. Adams, Nature (London) 396, 149 (1998).
8. A. Olkhovets, D. W. Carr, J. M. Parpia, and H. G. Craighead, Technical Digest, MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland, 21-25 Jan. 2001 (IEEE, Piscataway, NJ, 2001), p. 298.
9. W. Zhang, R. Baskaran and K. L. Turner, Sens. Actuators A 102, 139 (2002).
10. R. Grimshaw, Nonlinear Ordinary Differential Equations (CRC, Boca Raton, FL, 1993).
11. S. G. Adams, F. M. Bertsch, K. A. Shaw, and N. C. Macdonald, J. Microelectromech. Syst. 7, 172 (1998).
12. N. C. Macdonald, Microelectron. Eng. 32, 49 (1996).
13. K. L. Turner, Digest of Technical Papers, Transducers'99, The 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, 7-10 June 1999 (unpublished).
14. K. L. Turner, P. G. Hartwell, F. M. Bertsch, and N. C. Macdonald, ASME International Mechanical Engineering Congress and Exposition Proceedings of Microelectromechanical Systems (MEMS), Anaheim, CA, 15-20 Nov. 1998 (ASME, New York, 1998), p. 335.
15. R. H. Rand, Lecture Notes on Nonlinear Vibrations, Version 34a [available at http://www.tam.cornell.edu/randdocs], 2000.