Characterization of electrostatically coupled microcantilevers

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 295-304

  Napoli, Mariateresa ^a   Zhang, Wenhua ^a   Turner, Kimberly ^a   Bamieh, Bassam ^a  

^a University of California   (United States)

Author keywords

Electrostatically actuated microcantilevers; Multiprobe devices; Parametric resonance; System identification

Indexed keywords

APPROXIMATION THEORY; ARRAYS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; IDENTIFICATION (CONTROL SYSTEMS); MATHEMATICAL MODELS; OSCILLATORS (MECHANICAL); PROBES; RESONANCE; TRANSFER FUNCTIONS;

ELECTROSTATICALLY ACTUATED MICROCANTILEVERS; MULTIPROBE DEVICES; PARAMETRIC RESONANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 18844387629     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839349     Document Type: Article

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