Tunable microelectromechanical filters that exploit parametric resonance

Journal of Vibration and Acoustics

Volumn 127, Issue 5, 2005, Pages 423-430

  Rhoads, Jeffrey F ^a   Shaw, Steven W ^a,b   Turner, Kimberly L ^b   Baskaran, Rajashree ^b,c  

^a Michigan State University   (United States)

^b University of California   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Bandpass filter; MEMS; Nonlinear oscillations; Parametric excitation

Indexed keywords

ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; OSCILLATIONS; OSCILLATORS (MECHANICAL); PARAMETRIC OSCILLATORS; RESONANCE;

NONLINEAR OSCILLATIONS; PARAMETRIC EXCITATION; PARAMETRIC RESONANCE;

BANDPASS FILTERS;

EID: 27744545237     PISSN: 10489002     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2013301     Document Type: Article

References (18)

1. Taylor, J. T., and Huang, Q., eds., 1997, CRC Handbook of Electrical Filters, CRC Press, Boca Raton, Florida, pp. 45-142, 353-418.
2. Johnson, R. A., Borner, M., and Konno, M., 1971, "Mechanical Filters - A Review of Progress," IEEE Trans. Sonics Ultrason., SU-18, pp. 155-170.
3. Nguyen, C. T.-C., 1999, "Micromechanical Filters for Miniaturized Low-Power Communications," 3673-19, Proceedings of SPIE: Smart Structures and Materials 1999: Smart Electronics and MEMS, V. K. Varadan, ed., 3673, pp. 55-66.
4. Shaw, S. W., Turner, K. L., Rhoads, J. F., and Baskaran, R., 2004, "Parametrically Excited MEMS-Based Filters," Proceedings of the IUTAM Symposium on Chaotic Dynamics and Control of Systems and Processes in Mechanics (to be published).
5. Piekarski, B., DeVoe, D., Dubey, M., Kaul, R., Conrad, J., and Zeto, R., 2001, "Surface Micromachined Piezoelectric Resonant Beam Filters," Sens. Actuators, A, 91, pp. 313-320.
6. Lin, L., Howe, R. T., and Pisano, A. P., 1998, "Microelectromechanical Filters for Signal Processing," J. Microelectromech. Syst., 7, pp. 286-294.
7. Nguyen, C. T.-C., 1995, "Micromechanical Resonators for Oscillators and Filters," Proceedings, 1995 IEEE International Ultrasonics Symposium, pp. 489-499.
8. Wang, K., and Nguyen, C. T.-C., 1997, "High-Order Micromechanical Electronic Filters," Proceedings, 1997 IEEE International Micro Electro Mechanical Workshop, pp. 25-30.
9. Turner, K. L., Miller, S. A., Hartwell, P. G., MacDonald, N. C., Strogatz, S. H., and Adams, S. G., 1998, "Five Parametric Resonances in a Microelectromechanical System," Nature (London), 396, pp. 149-152.
10. Machui, J., Bauregger, J., Riha, G., and Schropp, I., 1995, "SAW Devices in Cellular and Cordless Phones," 1995 IEEE Ultrasonics Symp. Proc., pp. 121-130.
11. Wright, P. V., 1992, "A Review of SAW Resonator Filter Technology," 1992 IEEE Ultrasonics Symp. Proc., pp. 29-38.
12. Ishihara, F., Koyamada, Y., and Yoshikawa, S., 1975, "Narrow Band Filters Using Surface Acoustic Wave Resonators," 1975 IEEE Ultrasonics Symp. Proc., pp. 381-383.
13. Tiersten, H. F., and Smythe, R. C., 1975, "Guided Acoustic Surface Wave Filters," 1975 IEEE Ultrasonics Symp. Proc., pp. 293-294.
14. Adams, S. G., Bertsch, F., and MacDonald, N. C., 1998, "Independent Tuning of Linear and Nonlinear Stiffness Coefficients," J. Microelectromech. Syst., 7, pp. 172-180.
15. Zhang, W., Baskaran, R., and Turner, K. L., 2003, "Tuning the Dynamic Behavior of Parametric Resonance in a Micromechanical Oscillator," Appl. Phys. Lett., 82, pp. 130-132.
16. Zhang, W., Baskaran, R., and Turner, K. L., 2002, "Effect of Cubic Nonlinearity on Auto-Parametrically Amplified Resonant MEMS Mass Sensor," Sens. Actuators, A, 102, pp. 139-150.
17. Nayfeh, A. H., and Mook, D. T., 1979, Nonlinear Oscillations, Wiley, New York.
18. Rhoads, J. F., Shaw, S. W., Tuner, K. L., Moehlis, J., and DeMartini, B. E., 2004, "On the Response of Systems with Generalized Parametric Excitation Including Application to MEMS," (in preparation).