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Volumn 16, Issue 2, 2007, Pages 454-461

Side-wall vertical electrodes for lateral field microfluidic applications

Author keywords

Conformably bonding; Dielectrophoresis (DEP); Electroplating; Flexible PDMS; Lateral manipulation; Magnetohydrodynmic (MHD); Microfluidics; Multilayer SU 8; Surface topology; Vertical electrodes

Indexed keywords

ELECTRIC FIELDS; ELECTRODES; ELECTROPLATING; LITHOGRAPHY; MICROCHANNELS; MICROFLUIDICS; SURFACE PROPERTIES;

EID: 34147140510     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.889530     Document Type: Article
Times cited : (87)

References (49)
  • 1
    • 0037096666 scopus 로고    scopus 로고
    • Micro total analysis systems. 1. Introduction, theory, and technology
    • D. R. Reyes, D. Iossifidis, P. Auroux, and A. Manz, "Micro total analysis systems. 1. Introduction, theory, and technology," Anal. Chem., vol. 74, pp. 2623-2636, 2002.
    • (2002) Anal. Chem , vol.74 , pp. 2623-2636
    • Reyes, D.R.1    Iossifidis, D.2    Auroux, P.3    Manz, A.4
  • 2
    • 0037902179 scopus 로고    scopus 로고
    • Microfluidic devices for cellomics: A review
    • H. Andersson and A. van den Berg, "Microfluidic devices for cellomics: a review," Sens. Actuators B: Chem., vol. 92, no. 3, pp. 315-325, 2003.
    • (2003) Sens. Actuators B: Chem , vol.92 , Issue.3 , pp. 315-325
    • Andersson, H.1    van den Berg, A.2
  • 4
    • 0036906211 scopus 로고    scopus 로고
    • Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump
    • J. Darabi, M. Rada, M. Ohadi, and J. Lawler, "Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump," J. Microelectromech. Syst., vol. 11, no. 6, pp. 684-690, 2002.
    • (2002) J. Microelectromech. Syst , vol.11 , Issue.6 , pp. 684-690
    • Darabi, J.1    Rada, M.2    Ohadi, M.3    Lawler, J.4
  • 5
    • 0028699978 scopus 로고
    • Electroosmotic pumping and electrophoretic separations for miniaturized chemical-analysis systems
    • A. Manz et al., "Electroosmotic pumping and electrophoretic separations for miniaturized chemical-analysis systems," J. Micromech. Microeng. vol. 4, pp. 257-265, 1994.
    • (1994) J. Micromech. Microeng , vol.4 , pp. 257-265
    • Manz, A.1
  • 6
    • 0035880578 scopus 로고    scopus 로고
    • Electroosmotically induced hydraulic pumping with integrated electrodes in microfluidic devices
    • T. E. McKnight, C. T. Culbertson, S. C. Jacobson, and J. M. Ramsey, "Electroosmotically induced hydraulic pumping with integrated electrodes in microfluidic devices," Anal. Chem., vol. 73, pp. 4045-4049, 2001.
    • (2001) Anal. Chem , vol.73 , pp. 4045-4049
    • McKnight, T.E.1    Culbertson, C.T.2    Jacobson, S.C.3    Ramsey, J.M.4
  • 7
    • 0036905767 scopus 로고    scopus 로고
    • Fabrication and characterization of electrokinetic micro pumps
    • C. H. Chen and J. G. Santiago, "Fabrication and characterization of electrokinetic micro pumps," J. Microelectromech. Syst., vol. 11, no. 6, pp. 672-683, 2002.
    • (2002) J. Microelectromech. Syst , vol.11 , Issue.6 , pp. 672-683
    • Chen, C.H.1    Santiago, J.G.2
  • 8
    • 0012637388 scopus 로고    scopus 로고
    • Electrowetting-based actuation of droplets for integrated microfluidics
    • M. G. Pollack, A. D. Shenderov, and R. B. Fair, "Electrowetting-based actuation of droplets for integrated microfluidics," Lab on a Chip vol. 2, pp. 96-101, 2002.
    • (2002) Lab on a Chip , vol.2 , pp. 96-101
    • Pollack, M.G.1    Shenderov, A.D.2    Fair, R.B.3
  • 9
    • 0036141528 scopus 로고    scopus 로고
    • Electrowetting and electrowetting-on-dielectric for microscale liquid handling
    • J. Lee, H. Moon, J. Fowler, T. Schoellhammer, and C. J. Kim, "Electrowetting and electrowetting-on-dielectric for microscale liquid handling," Sens. Actuators A, vol. 95, pp. 259-268, 2002.
    • (2002) Sens. Actuators A , vol.95 , pp. 259-268
    • Lee, J.1    Moon, H.2    Fowler, J.3    Schoellhammer, T.4    Kim, C.J.5
  • 10
    • 14944364128 scopus 로고    scopus 로고
    • Magnetic and electric manipulation of a single cell in fluid
    • Mater. Res. Soc
    • H. Lee, T. P. Hunt, and R. M. Westervelt, "Magnetic and electric manipulation of a single cell in fluid," in Mater. Res. Soc. Symp. Proc., 2004, vol. 820, Mater. Res. Soc..
    • (2004) Mater. Res. Soc. Symp. Proc , vol.820
    • Lee, H.1    Hunt, T.P.2    Westervelt, R.M.3
  • 11
    • 0037204021 scopus 로고    scopus 로고
    • Magneto hydrodynamic (MHD) pump fabricated with ceramic tapes
    • J. Zhong, M.Yi, and H. H. Bau, "Magneto hydrodynamic (MHD) pump fabricated with ceramic tapes," Sens. Actuators A, vol. 96, no. 1, pp. 59-66(8), 2002.
    • (2002) Sens. Actuators A , vol.96 , Issue.1-8 , pp. 59-66
    • Zhong, J.1    Yi, M.2    Bau, H.H.3
  • 12
    • 0033743245 scopus 로고    scopus 로고
    • An AC magnetohydrodynamic micropump
    • A. V. Lemoff and A. P. Lee, "An AC magnetohydrodynamic micropump," Sens. Actuators B: Chem., vol. 63, no. 3, pp. 178-185, 2000.
    • (2000) Sens. Actuators B: Chem , vol.63 , Issue.3 , pp. 178-185
    • Lemoff, A.V.1    Lee, A.P.2
  • 13
    • 0033882554 scopus 로고    scopus 로고
    • Theoretical and experimental study of MHD (magnetohydrodynamic) micropump
    • J. Jang and S. S. Lee, "Theoretical and experimental study of MHD (magnetohydrodynamic) micropump," Sens. Actuators A: Phys., vol. 80, no. 1, pp. 84-89, 2000.
    • (2000) Sens. Actuators A: Phys , vol.80 , Issue.1 , pp. 84-89
    • Jang, J.1    Lee, S.S.2
  • 14
    • 0036863537 scopus 로고    scopus 로고
    • A microchip electrophoresis system with integrated in-plane electrodes for contactless conductivity detection
    • J. Lichtenberg, N. F. de Rooij, and E. Verpoorte, "A microchip electrophoresis system with integrated in-plane electrodes for contactless conductivity detection," Electrophoresis, vol. 23, no. 21, pp. 3769-3780, 2002.
    • (2002) Electrophoresis , vol.23 , Issue.21 , pp. 3769-3780
    • Lichtenberg, J.1    de Rooij, N.F.2    Verpoorte, E.3
  • 15
    • 0000537966 scopus 로고    scopus 로고
    • Dielectrophoresis: Using inhomogeneous AC electrical fields to separate and manipulate cells
    • R. Pethig, "Dielectrophoresis: Using inhomogeneous AC electrical fields to separate and manipulate cells," Crit. Rev. Biotechnol., vol. 16, no. 4, pp. 331-348, 1996.
    • (1996) Crit. Rev. Biotechnol , vol.16 , Issue.4 , pp. 331-348
    • Pethig, R.1
  • 16
    • 0036023077 scopus 로고    scopus 로고
    • Particle separation by dielectrophoresis
    • P. R. C. Gascoyne and J. V., "Particle separation by dielectrophoresis," Electrophoresis, vol. 23, no. 13, pp. 1973-1983, 2002.
    • (2002) Electrophoresis , vol.23 , Issue.13 , pp. 1973-1983
    • Gascoyne, P.R.C.1    V., J.2
  • 17
    • 0030866563 scopus 로고    scopus 로고
    • Manipulation and trapping of sub-micron bioparticles using dielectrophoresis
    • N. G. Green, H. Morgan, and J. J. Milner, "Manipulation and trapping of sub-micron bioparticles using dielectrophoresis," J. Biochem. Biophys. Meth., vol. 35, no. 2, pp. 89-102, 1997.
    • (1997) J. Biochem. Biophys. Meth , vol.35 , Issue.2 , pp. 89-102
    • Green, N.G.1    Morgan, H.2    Milner, J.J.3
  • 18
    • 0029582885 scopus 로고
    • Electrorotational studies of the cytoplasmic dielectric properties of Friend murine erythroleukaemia cells
    • Y. Huang et al., "Electrorotational studies of the cytoplasmic dielectric properties of Friend murine erythroleukaemia cells," Phys. Med. Biol., vol. 40, no. 11, pp. 1789-1806, 1995.
    • (1995) Phys. Med. Biol , vol.40 , Issue.11 , pp. 1789-1806
    • Huang, Y.1
  • 19
    • 0032300427 scopus 로고    scopus 로고
    • Electrorotation and dielectrophoresis
    • Suppl
    • A. D. Goater and R. Pethig, "Electrorotation and dielectrophoresis," Parasitol., vol. 117, pp. S177-S189, 1998, Suppl.
    • (1998) Parasitol , vol.117
    • Goater, A.D.1    Pethig, R.2
  • 20
    • 0035478764 scopus 로고    scopus 로고
    • A microfluidics platform for cell fusion
    • D. T. Chiu, "A microfluidics platform for cell fusion," Curr. Opin. Chem. Biol., vol. 5, no. 5, pp. 609-612, 2001.
    • (2001) Curr. Opin. Chem. Biol , vol.5 , Issue.5 , pp. 609-612
    • Chiu, D.T.1
  • 21
    • 4544307096 scopus 로고    scopus 로고
    • A microfluidic device for electrofusion of biological vesicles
    • G. Tresset and S. Takeuchi, "A microfluidic device for electrofusion of biological vesicles," Biomed. Microdev., vol. 6, no. 3, pp. 213-218, 2004.
    • (2004) Biomed. Microdev , vol.6 , Issue.3 , pp. 213-218
    • Tresset, G.1    Takeuchi, S.2
  • 22
    • 20844462563 scopus 로고    scopus 로고
    • Microfluidic detection and analysis by integration of thermocapillary actuation with a thin-film optical waveguide
    • J. P. Valentino, S. M. Troian, and S. Wagner, "Microfluidic detection and analysis by integration of thermocapillary actuation with a thin-film optical waveguide," Appl. Phys. Lett., vol. 86, no. 18, pp. 184101-184103, 2005.
    • (2005) Appl. Phys. Lett , vol.86 , Issue.18 , pp. 184101-184103
    • Valentino, J.P.1    Troian, S.M.2    Wagner, S.3
  • 23
    • 0000701749 scopus 로고    scopus 로고
    • An integrated micromachined electrochemical pump and dosing system
    • S. Bohm, W. Olthuis, and P. Bergveld, "An integrated micromachined electrochemical pump and dosing system," Biomed. Microdev., vol. 1, no. 2, pp. 121-130, 1999.
    • (1999) Biomed. Microdev , vol.1 , Issue.2 , pp. 121-130
    • Bohm, S.1    Olthuis, W.2    Bergveld, P.3
  • 24
    • 2942517695 scopus 로고    scopus 로고
    • Electrochemical sensors
    • E. Bakker, "Electrochemical sensors," Anal. Chem., vol. 76, pp. 3285-3298, 2004.
    • (2004) Anal. Chem , vol.76 , pp. 3285-3298
    • Bakker, E.1
  • 25
    • 0033101199 scopus 로고    scopus 로고
    • Electric impedance spectroscopy using microchannels with integrated metal electrodes
    • H. E. Ayliffe, A. B. Frazier, and R. D. Rabbitt, "Electric impedance spectroscopy using microchannels with integrated metal electrodes," J. Microelectromech. Syst., vol. 8, no. 1, pp. 50-57, 1999.
    • (1999) J. Microelectromech. Syst , vol.8 , Issue.1 , pp. 50-57
    • Ayliffe, H.E.1    Frazier, A.B.2    Rabbitt, R.D.3
  • 26
    • 1642462934 scopus 로고    scopus 로고
    • Microfluidic flow transducer based on the measurement of electrical admittance
    • J. Collins and A. P. Lee, "Microfluidic flow transducer based on the measurement of electrical admittance," Lab on a Chip, vol. 4, no. 1, pp. 7-10, 2004.
    • (2004) Lab on a Chip , vol.4 , Issue.1 , pp. 7-10
    • Collins, J.1    Lee, A.P.2
  • 27
    • 7944221274 scopus 로고    scopus 로고
    • Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation
    • J. Z. Chen, A. A. Darhuber, S. M. Troian, and S. Wagner, "Capacitive sensing of droplets for microfluidic devices based on thermocapillary actuation," Lab on a Chip, vol. 4, no. 5, pp. 473-480, 2004.
    • (2004) Lab on a Chip , vol.4 , Issue.5 , pp. 473-480
    • Chen, J.Z.1    Darhuber, A.A.2    Troian, S.M.3    Wagner, S.4
  • 28
    • 0034718605 scopus 로고    scopus 로고
    • Capacitance cytometry: Measuring biological cells one by one
    • L. L. Sohn, O. A. Saleh, G. R. Facer, A. J. Beavis, R. S. Allan, and D. A. Notterman, "Capacitance cytometry: Measuring biological cells one by one," in PNAS, 2000, vol. 97, no. 20, pp. 10687-10690.
    • (2000) PNAS , vol.97 , Issue.20 , pp. 10687-10690
    • Sohn, L.L.1    Saleh, O.A.2    Facer, G.R.3    Beavis, A.J.4    Allan, R.S.5    Notterman, D.A.6
  • 29
    • 0033106015 scopus 로고    scopus 로고
    • Cell separation on microfabricated electrodes using dielectrophoretic/gravitational field-flow fractionation
    • J. Yang, Y. Huang, X. B. Wang, F. F. Becker, and P. R. C. Gascoyne, "Cell separation on microfabricated electrodes using dielectrophoretic/gravitational field-flow fractionation," Anal. Chem., vol. 71, no. 5, pp. 911-918, 1999.
    • (1999) Anal. Chem , vol.71 , Issue.5 , pp. 911-918
    • Yang, J.1    Huang, Y.2    Wang, X.B.3    Becker, F.F.4    Gascoyne, P.R.C.5
  • 30
    • 0032582171 scopus 로고    scopus 로고
    • Separation of erythrocytes and latex beads by dielectrophoretic levitation and hyperlayer field-flow fractionation
    • J. Rousselet, G. H. Markx, and R. Pethig, "Separation of erythrocytes and latex beads by dielectrophoretic levitation and hyperlayer field-flow fractionation," Colloids and Surf. A: Physicochem. Eng. Aspects, vol. 140, no. 1, pp. 209-216(8), 1998.
    • (1998) Colloids and Surf. A: Physicochem. Eng. Aspects , vol.140 , Issue.1-8 , pp. 209-216
    • Rousselet, J.1    Markx, G.H.2    Pethig, R.3
  • 31
    • 0038791327 scopus 로고    scopus 로고
    • Electrowettingbased- droplet mixers for microfluidic systems
    • P. Paik, V. K. Pamula, M. G. Pollack, and R. B. Fair, "Electrowettingbased- droplet mixers for microfluidic systems," Lab on a Chip, vol. 3, pp. 28-33, 2003.
    • (2003) Lab on a Chip , vol.3 , pp. 28-33
    • Paik, P.1    Pamula, V.K.2    Pollack, M.G.3    Fair, R.B.4
  • 33
    • 0037102392 scopus 로고    scopus 로고
    • A microfabrication-based dynamic array cytometer
    • J. Voldman, M. L. Gray, M. Toner, and M. A. Schmidt, "A microfabrication-based dynamic array cytometer," Anal. Chem., vol. 74, pp. 3984-3990, 2002.
    • (2002) Anal. Chem , vol.74 , pp. 3984-3990
    • Voldman, J.1    Gray, M.L.2    Toner, M.3    Schmidt, M.A.4
  • 34
    • 4744345465 scopus 로고    scopus 로고
    • A microfabricated device for subcellular organelle sorting
    • H. Lu, S. Gaude, M. A. Schmidt, and K. F. Jensen, "A microfabricated device for subcellular organelle sorting," Anal. Chem., vol. 76, pp. 5705-5712, 2004.
    • (2004) Anal. Chem , vol.76 , pp. 5705-5712
    • Lu, H.1    Gaude, S.2    Schmidt, M.A.3    Jensen, K.F.4
  • 35
    • 12344334376 scopus 로고    scopus 로고
    • A microfluidic electroporation device for cell lysis
    • H. Lu, M. A. Schmidt, and K. F. Jensen, "A microfluidic electroporation device for cell lysis," Lab on a Chip, vol. 5, no. 1, pp. 23-29, 2005.
    • (2005) Lab on a Chip , vol.5 , Issue.1 , pp. 23-29
    • Lu, H.1    Schmidt, M.A.2    Jensen, K.F.3
  • 37
    • 0035124001 scopus 로고    scopus 로고
    • A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
    • F. E. H. Tay, J. A. vanKan, F. Watt, and W. O. Choong, "A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels," J. Micromech. Microeng., vol. 11, pp. 27-32, 2001.
    • (2001) J. Micromech. Microeng , vol.11 , pp. 27-32
    • Tay, F.E.H.1    vanKan, J.A.2    Watt, F.3    Choong, W.O.4
  • 40
    • 0242637018 scopus 로고    scopus 로고
    • Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts
    • H. S. Khoo, K.-K. Liu, and F.-G. Tseng, "Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts," J. Micromech. Microeng., vol. 13, no. 6, pp. 822-831, 2003.
    • (2003) J. Micromech. Microeng , vol.13 , Issue.6 , pp. 822-831
    • Khoo, H.S.1    Liu, K.-K.2    Tseng, F.-G.3
  • 41
    • 0036735653 scopus 로고    scopus 로고
    • A low-temperature wafer bonding using patternable materials
    • C. T. Pan, H. Yang, S. C. Shen, M. C. Chou, and H. P. Chou, "A low-temperature wafer bonding using patternable materials," J. Micromech. Microeng., vol. 12, pp. 611-615, 2002.
    • (2002) J. Micromech. Microeng , vol.12 , pp. 611-615
    • Pan, C.T.1    Yang, H.2    Shen, S.C.3    Chou, M.C.4    Chou, H.P.5
  • 42
    • 4544285779 scopus 로고    scopus 로고
    • Fabrication of miniaturized fluidic devices using SU-8 based lithography and wafer bonding
    • P. Svasek, E. Svasek, B. Lendl, and M. Vellekoop, "Fabrication of miniaturized fluidic devices using SU-8 based lithography and wafer bonding," Sens. Actuators A, vol. 115, pp. 571-580, 2004.
    • (2004) Sens. Actuators A , vol.115 , pp. 571-580
    • Svasek, P.1    Svasek, E.2    Lendl, B.3    Vellekoop, M.4
  • 44
    • 29144455448 scopus 로고    scopus 로고
    • A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films
    • P. Abgrall et al., "A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films," J. Micromech. Microeng., vol. 16, pp. 113-121, 2006.
    • (2006) J. Micromech. Microeng , vol.16 , pp. 113-121
    • Abgrall, P.1
  • 45
    • 2342620804 scopus 로고    scopus 로고
    • J. Carlier1, S. Arscott, V. Thomy, J. C. Fourrier, F. Caron, J. C. Camart, C. Druon, and P. Tabourier, Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis, J. Micromech. Microeng., 14, pp. 619-624, 2004.
    • J. Carlier1, S. Arscott, V. Thomy, J. C. Fourrier, F. Caron, J. C. Camart, C. Druon, and P. Tabourier, "Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis," J. Micromech. Microeng., vol. 14, pp. 619-624, 2004.
  • 46
    • 3142768904 scopus 로고    scopus 로고
    • Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a 'flexible semi-solid transfer' (FST) process
    • Y. Song, C. S. S. R. Kumar, and J. Hormes, "Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a 'flexible semi-solid transfer' (FST) process," J. Micromech. Microeng., vol. 14, pp. 932-940, 2004.
    • (2004) J. Micromech. Microeng , vol.14 , pp. 932-940
    • Song, Y.1    Kumar, C.S.S.R.2    Hormes, J.3
  • 47
    • 0034545712 scopus 로고    scopus 로고
    • UV-LIGA micro-fabrication and test of an AC-type micropump based on the magnetohydrodynamic (MHD) principle
    • K.-H. Heng, W.Wang, M. C. Murphy, and K. Lian, "UV-LIGA micro-fabrication and test of an AC-type micropump based on the magnetohydrodynamic (MHD) principle," in Proc. SPIE, 2000, vol. 4177, pp. 174-184.
    • (2000) Proc. SPIE , vol.4177 , pp. 174-184
    • Heng, K.-H.1    Wang, W.2    Murphy, M.C.3    Lian, K.4
  • 48
    • 0034662187 scopus 로고    scopus 로고
    • Dual-electrode electrochemical detection for poly(dimethylsiloxane)-fabricated capillary electrophoresis microchips
    • R. S. Martin, A. J. Gawron, S. M. Lunte, and C. S. Henry, "Dual-electrode electrochemical detection for poly(dimethylsiloxane)-fabricated capillary electrophoresis microchips," Anal. Chem., vol. 72, pp. 3196-3202, 2000.
    • (2000) Anal. Chem , vol.72 , pp. 3196-3202
    • Martin, R.S.1    Gawron, A.J.2    Lunte, S.M.3    Henry, C.S.4
  • 49
    • 0347634354 scopus 로고    scopus 로고
    • An AC magnetohydrodynamic microfluidic switch for micro total analysis systems
    • A. V. Lemoff and A. P. Lee, "An AC magnetohydrodynamic microfluidic switch for micro total analysis systems," Biomed. Microdev., vol. 5, no. 1, pp. 55-60, 2003.
    • (2003) Biomed. Microdev , vol.5 , Issue.1 , pp. 55-60
    • Lemoff, A.V.1    Lee, A.P.2


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