Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts

Journal of Micromechanics and Microengineering

Volumn 13, Issue 6, 2003, Pages 822-831

  Khoo, Hwa Seng ^a   Liu, Kuo Kang ^a   Tseng, Fan Gang ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FAILURE ANALYSIS; FRACTURE; LITHOGRAPHY; SILICON; STRENGTH OF MATERIALS; X RAY ANALYSIS;

MICROPOSTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242637018     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/305     Document Type: Article

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