Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a 'flexible semi-solid transfer'(FST) process

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 932-940

  Song, Yujun ^a   Kumar, Challa S S R ^a   Hormes, Josef ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL RESISTANCE; HEAT TRANSFER; KETONES; MASS TRANSFER; ORGANIC POLYMERS; PHOTOLITHOGRAPHY; PHOTORESISTS; PRESSURE DROP; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SOLIDIFICATION; ULTRAVIOLET RADIATION;

DEEP REACTIVE ION ETCHING (DRIE); FLEXIBLE SEMI-SOLID TRANSFER (FST) PROCESS; MICROFLUIDIC REACTORS; POLYETHERETHERKETONES (PEEK);

CHEMICAL REACTORS;

EID: 3142768904     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/013     Document Type: Article

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