Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump

Journal of Microelectromechanical Systems

Volumn 11, Issue 6, 2002, Pages 684-690

  Darabi, Jeff ^a   Rada, Mihai ^b   Ohadi, Michael ^b   Lawler, John ^c  

^a University of South Carolina   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c ATEC Inc   (United States)

Author keywords

Electrohydrodynamics (EHDs); Ion drag; Micropump; Three dimensional (3 D) electrode

Indexed keywords

CERAMIC MATERIALS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; NIOBIUM; SPUTTER DEPOSITION; SUBSTRATES;

MICROPUMPS;

ELECTROHYDRODYNAMICS;

EID: 0036906211     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.805046     Document Type: Article

References (11)

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