A planar electroosmotic micropump

Journal of Microelectromechanical Systems

Volumn 11, Issue 6, 2002, Pages 672-683

  Chen, Chuan Hua ^a   Santiago, Juan G ^a  

^a Stanford University   (United States)

Author keywords

Electroosmotic (EO) pump; High pressure; Joule heating effects; Microfabrication; Microfluidics; Thermodynamic efficiency

Indexed keywords

ETCHING; HIGH PRESSURE EFFECTS; LITHOGRAPHY; SUBSTRATES;

MICROPUMPS;

ELECTROOSMOSIS;

EID: 0036905767     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.805055     Document Type: Article

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