Novel piezoelectric polyimide MEMS

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 782-785

  Atkinson, G M ^a   Pearson, R E ^a   Ounaies, Z ^b   Park, C ^c   Harrison, J S ^d   Dogan, S ^a   Midkiff, J A ^a  

^a VIRGINIA COMMONWEALTH UNIVERSITY   (United States)

^b Virginia Commonwealth University   (United States)

^c NATIONAL INSTITUTE OF AEROSPACE   (United States)

^d NASA LANGLEY RESEARCH CENTER   (United States)

Author keywords

Bridge circuits; Curing; Electrodes; Fabrication; Lithography; Metallization; Micromechanical devices; Piezoelectric materials; Polyimides; Resists

Indexed keywords

ACTUATORS; BRIDGE CIRCUITS; CURING; ELECTRODES; FABRICATION; LITHOGRAPHY; METALLIZING; MICROSYSTEMS; PHOTORESISTS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; POLYIMIDES; POLYMER FILMS; TRANSDUCERS;

CONVENTIONAL LITHOGRAPHY; FABRICATION PROCESS; METALLIZATION PROCESS; MICROELECTROMECHANICAL SENSORS; MICROMECHANICAL DEVICE; PIEZOELECTRIC POLYIMIDES; RESISTS; SUSPENDED STRUCTURE;

SOLID-STATE SENSORS;

EID: 71549136565     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215590     Document Type: Conference Paper

References (3)

1. Z. Ounaies and J.S. Harrison, "An Investigation of Piezoelectricity of a Nitrile-Substituted Polyimide", accepted Journal of Polymer Science: Polymer Physics, August, (2002).
2. C. Park, Z. Ounaies, J. Su, J.G. Smith Jr., J.S. Harrison, "Polarization Stability of Amorphous Piezoelectric Polyimides", Materials Research Society Meeting Proceedings: Symposium FF, December, (1999).
3. R.L. Kubena, G.M. Atkinson, W.P. Robinson and F.P. Stratton, "High Performance Tunneling Accelerometer", J. Vac. Sci. Technol. B, 14(6), Nov/Dec 1996.