Instrumentation developments in atom probe tomography: Applications in semiconductor research

Microscopy and Microanalysis

Volumn 12, Issue SUPPL. 2, 2006, Pages 1730-1731

  Bunton, Joseph H ^a   Lenz, Daniel ^a   Olson, Jesse D ^a   Thompson, Keith ^a   Ulfig, Rob ^a   Larson, David ^a   Kelly, Tom ^a  

^a Imago Scientific Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750880342     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927606065809     Document Type: Conference Paper

References (5)

1. Bunton et al., Patent application WO2005104307
2. Deconihout et. al., Surf. Int. Anal., In press.
3. Kelly et al., Ultramicroscopy, vol. 62 (1996) pp. 29-42. NSF DMR-8911332
4. Bajikar et. al., J. de Physique IV, vol. C5-6 (1996) pp. 303-308.
5. Kellog, G.L., and T.T. Tsong., J. Appl. Phys. 51 (2) (1980): 1184-1193.