Nanolithography of silicon: An approach for investigating tip-surface interactions during writing

Applied Physics Letters

Volumn 79, Issue 17, 2001, Pages 2820-2822

  Ramsier, R D ^a   Ralich, R M ^a   Lyuksyutov, S F ^a  

^a UNIVERSITY OF AKRON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035934819     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1413736     Document Type: Article

References (10)

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