Thickness determination of molecularly thin lubricant films by angle-dependent X-ray photoelectron spectroscopy

Applied Surface Science

Volumn 253, Issue 10, 2007, Pages 4688-4693

  Pang, Chongjun ^a,b   Bai, Mingwu ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Angle dependent XPS; Lubricant; Metrology; Perfluoropolyether; Thickness determination

Indexed keywords

ATOMIC FORCE MICROSCOPY; HYDROCARBONS; LUBRICANTS; MAGNETIC DISK STORAGE; MEASUREMENTS; MOLECULAR DYNAMICS; THIN FILMS;

ANGLE-DEPENDENT XPS; PERFLUOROPOLYETHER; THICKNESS DETERMINATION;

THICKNESS MEASUREMENT;

EID: 33847013720     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.10.027     Document Type: Article

References (35)

1. Khurshudov A., and Waltman R.J. Wear 251 (2001) 1124
2. Gui J. IEEE Trans. Magn. 39 (2003) 716
3. Mate C.M., Dai Q., Payne R.N., Knigge B.E., and Baumgart P. IEEE Trans. Magn. 41 (2005) 626
4. Waltman R.J. Langmuir 20 (2004) 3166
5. Toney M.F., Mate C.M., Leach K.A., and Pocker D. J. Colloid Interface Sci. 225 (2000) 219
6. Toney M.F., Mate C.M., and Pocker D. IEEE Trans. Magn. 34 (1998) 1774
7. Tang H., Ma X., Barth G., Liu J., Stirniman M., and Gui J. IEEE Trans. Magn. 41 (2005) 621
8. Pang C., and Bai M. Appl. Surf. Sci. 253 (2006) 488
9. Fadley C.S. J. Elect. Spect. Rel. Phenom. 5 (1974) 725
10. Brunner J., and Zogg H. J. Elect. Spect. Rel. Phenom. 5 (1974) 911
11. Fadley C.S. Prog. Surf. Sci. 16 (1984) 275
12. Swami G.T.K. Surf. Interface Anal. 14 (1989) 3
13. Moulder J.F., Hammond J.S., and Smith K.L. Appl. Surf. Sci. 25 (1986) 446
14. Walters K.B., Schwark D.W., and Hirt D.E. Langmuir 19 (2003) 5851
15. de Smet L.C.P.M., Stork G.A., Hurenkamp G.H.F., Sun Q., Topal H., Vronen P.J.E., Sieval A.B., Wright A., Visser G.M., Zuilhof H., and Sudhölter E.J.R. J. Am. Chem. Soc. 125 (2003) 13916
16. Jakubowicz A., Jia H., Wallace R.M., and Gnade B.E. Langmuir 21 (2005) 950
17. Zhang Q., and Archer L.A. Langmuir 22 (2006) 717
18. Livesey A.K., and Smith G.C. J. Elect. Spect. Rel. Phenom. 67 (1994) 439
19. Opila R.L., and Eng Jr. J. Prog. Surf. Sci. 69 (2002) 125
20. Cumpson P.J. J. Elect. Spect. Rel. Phenom. 73 (1995) 25
21. Lu Z.H., McCaffrey J.P., Brar B., Wilk G.D., Wallace R.M., Feldman L.C., and Tay S.P. Appl. Phys. Lett. 71 (1997) 2764
22. Kubler L., Lutz F., Bischoff J.L., and Bolmont D. Surf. Sci. 251/252 (1991) 305
23. Mitchell D.F., Clark K.B., Bardwell J.A., Lennard W.N., Massoumi G.R., and Mitchell I.V. Surf. Interface Anal. 21 (1994) 44
24. Briggs D. Surface Analysis of Polymers by XPS and Static SIMS (1998), Cambridge University Press, Cambridge (Chapter 2)
25. Linder R.E., and Mee P.B. IEEE Trans. Magn. 18 (1982) 1073
26. Robinson K.S., and Schmiedel H. Fizika A 5 (1996) 49
27. Pan F., Lin Y., and Horng S. Appl. Surf. Sci. 47 (1991) 9
28. Heister K., Zharnikov M., Grunze M., Johansson L.S.O., and Ulman A. Langmuir 17 (2001) 8
29. Ihm K., Kang T., Han J., Moon S., Hwang C., Kim K., Hwang H., Jeon C., Kim H., Kim B., and Park C. J. Elect. Spect. Rel. Phenom. 144-147 (2005) 397
30. Zharnikov M., Frey S., Heister K., and Grunze M. Langmuir 16 (2000) 2697
31. Seshadri K., Froyd K., Parikh A.N., Allara D.L., Lercel M.J., and Craighead H.G. J. Phys. Chem. 100 (1996) 15900
32. Hoshino M., and Kimachi Y. J. Elect. Spect. Rel. Phenom. 81 (1996) 79
33. Jablonski A., and Powell C.J. Surf. Interface Anal. 20 (1993) 771
34. Ikkala O., and Brinke G.T. Science 295 (2002) 2407
35. Katz H.E., Lovinger A.J., Johnson J., Kloc C., Siegrist T., Li W., Lin Y.-Y., and Dodabalapur A. Nature 404 (2000) 478