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SAT This equation and eq 1 give nearly identical values for the critical dose. However, since the specific kinetic rate laws describing the critical dose behavior are expected to be quite complicated because of the multiple contributing processes and the complexities of the solid state matrix, no attempt was made to determine a fundamental rate law. On this basis, the tanh function, which contains multiple exponential terms, was chosen for the fitting.
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A detailed investigation has been conducted on the role of X-rays in damage to trifluoroacetamide-terminated monolayers on different substrates, and the results are consistent with the premise that electrons scattered from the film are responsible for damage rather than the X-rays. Differences in the loss of fluorine atoms correlates with the efficiency of secondary electron generation from a given substrate. See: Graham, R. L.; Bain, C. D.; Biebuyck, H. A.; Laibinis, P. E.; Whitesides, G. M. J. Phys. Chem. 1993, 97, 9456-9464.
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Experiments are in progress using forward recoil elastic scattering (FRES) analysis to determine the H atom content in these films.
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2/Ti cases. See also footnote 25.
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