Green laser crystallization of α-Si films using preformed α-Si lines

ECS Transactions

Volumn 3, Issue 8, 2006, Pages 185-191

  Brunets, I ^a   Holleman, J ^a   Kovalgin, A Y ^a   Aarnink, A A I ^a   Boogaard, A ^a   Oesterlin, P ^b   Schmitz, J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b INNOVAVENT GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; GRAIN BOUNDARIES; LASER APPLICATIONS; PUMPING (LASER); SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ENERGY DENSITY; GRAIN BOUNDARY LOCATION; GREEN LASER CRYSTALLIZATION; SILICON FILMS;

THIN FILMS;

EID: 33846943304     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2356353     Document Type: Conference Paper

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