Advanced excimer laser crystallization techniques

Thin Solid Films

Volumn 383, Issue 1-2, 2001, Pages 39-44

  Mariucci, L ^a   Pecora, A ^a   Carluccio, R ^a   Fortunato, G ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; EXCIMER LASERS; FILM GROWTH; GRAIN GROWTH; LASER BEAM EFFECTS; LASER PULSES; MASKS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SEMICONDUCTING SILICON;

EXCIMER LASER CRYSTALLIZATION (ELC);

THIN FILM TRANSISTORS;

EID: 0035247079     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01625-4     Document Type: Article

References (19)

1. Kuriyama H., Nohda T., Aya Y., Kuwahara T., Wakisaka K., Kiyama S., Tsuda S. Jpn. J. Appl. Phys. 33:1994;5657.
2. Sameshima T., Kohno A., Sekiya M., Hara M., Sano N. Appl. Phys. Lett. 64:1994;1018.
3. P. Lagagneux, F. Petinot, O. Huet, F. Plais, C. Reita, D. Pribat, R. Carluccio, A. Pecora, L. Mariucci, G. Fortunato, Proc. ESSDERC 96, Editions Frontiers, 1996, p. 1071.
4. Im J.S., Kim H.J. Appl. Phys. Lett. 64:1994;2303.
5. Kim H.J., Im J.S. Appl. Phys. Lett. 68:1996;1513.
6. Mariucci L., Carluccio R., Pecora A., Foglietti V., Fortunato G., Legagneux P., Pribat D., Della Sala D., Stoemenos J. Thin Solid Films. 337:1999;137.
7. Mariucci L., Carluccio R., Pecora A., Fortunato G., Massussi F., Foglietti V., Della Sala D., Stoemenos J. Polycrystalline semiconductors V. Werner J.H., Strunk H.P., Schock H.W. Series Solid State Phenomena. 1999;175 Scitech Publ.
8. Ishikawa K., Ozawa M., Oh C., Matsumura M. Jpn. J. Appl. Phys. 37:1998;731.
9. Oh C., Ozawa M., Matsumura M. Jpn. J. Appl. Phys. Lett. 37:1998;L492.
10. Choi D.H., Shimizu K., Sugiura O., Matsumura M. Jpn. J. Appl. Phys. 31:1992;4545.
11. van der Wilt P.C., Ishihara R. Phys. Status Solidi (a). 166:1998;619.
12. Sposili R.S., Im J.S. Appl. Phys. Lett. 69:1996;2864.
13. Gupta V.V., Song H.J., Im J.S. Appl. Phys. Lett. 71:1997;99.
14. Wood R.F., Geist G.A. Phis. Rev. B. 34:1986;2606.
15. Mittiga A., Fornarini L., Carluccio R. Appl. Surf. Sci. 154/155:2000;112.
16. Bollanti S., Di lazzaro P., Flora F., Giordano G., Hermsen T., Letardi T., Zheng C.E. Appl. Phys. B. 50:1988;415.
17. K. Ishikawa, M. Ozawa, M. Matsumura, Proc. of AMLCD'97 Conf., 1997, pp. 63-67.
18. Hatano M., Moon S., Lee M., Suzuki K., Grigoropoulos C.P. J. Appl. Phys. 87:2000;36.
19. D.K. Fork, G.B. Anderson, J.B. Boyce, R.I. Johnson, P. Mei, Appl. Phys. Lett. 68 (1996).