Design, fabrication, and control of components in MEMS-based optical pickups

IEEE Transactions on Magnetics

Volumn 43, Issue 2, 2007, Pages 780-784

  Chiu, Yi ^a   Chiou, Jin Chern ^a   Fang, Weileun ^b   Lin, Yung Jiun ^a   Wu, Mingching ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Actuator; Microelectromechanical systems (MEMS); Optical pickup; Silicon on insulation (SOI); Small form factor

Indexed keywords

CONSUMER ELECTRONICS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SERVOMECHANISMS; SILICON ON INSULATOR TECHNOLOGY;

FORM FACTOR; OPTICAL PICKUP; SERVO CONTROL SYSTEM;

OPTICAL DISK STORAGE;

EID: 33846578279     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2006.888402     Document Type: Article

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