MEMS-based miniature optical pickup

IEEE Transactions on Magnetics

Volumn 41, Issue 2, 2005, Pages 967-970

  Chiu, Yi ^a   Chen, Cheng Huan ^b   Chiou, Jin Chern ^a   Fang, Weileun ^c   Shieh, Han Ping D ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Diffractive optical element; Microelectromechanical system (MEMS); Micromirror; Optical pickup

Indexed keywords

BANDWIDTH; DATA ACQUISITION; DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; ELECTROSTATICS; MICROACTUATORS; MIRRORS; NATURAL FREQUENCIES; OPTICAL BEAM SPLITTERS; PHOTOLITHOGRAPHY; VIDEODISKS;

DIFFRACTIVE OPTICAL ELEMENT; MICROELECTROMECHANICAL (MEMS) SYSTEMS; MICROMIRROR; REFRACTIVE LENS;

MICROELECTROMECHANICAL DEVICES;

EID: 14544289052     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.842077     Document Type: Article

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