Realization of free-space optical pickup head with stacked Si-based phase elements

IEEE Photonics Technology Letters

Volumn 17, Issue 1, 2005, Pages 214-216

  Chang, Jenq Yang ^a   Wang, Chih Ming ^a   Lee, Chien Chieh ^a   Shih, Hsi Fu ^b   Wu, Mount Learn ^c  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^c NeoStones MicroFabrication Corp   (Taiwan)

Author keywords

Diffractive optical elements; Microoptoelectromechanical systems (MOEMS); Pickup module; SiNx membrane

Indexed keywords

DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; HOLOGRAPHIC OPTICAL ELEMENTS; LENSES; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR LASERS; SILICON NITRIDE;

MICROOPTOELECTROMECHANICAL SYSTEMS; OPTICAL PICKUP HEAD; PICKUP MODULE;

MICROOPTICS;

EID: 12344275842     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.836896     Document Type: Article

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