A nonlinear reduced-order model for electrostatic MEMS

Proceedings of the ASME Design Engineering Technical Conference

Volumn 5 B, Issue , 2003, Pages 1771-1778

  Abdel Rahman, Eihab M ^a   Younis, Mohammad I ^a   Nayfeh, Ali H ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; ELECTROSTATICS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; NONLINEAR SYSTEMS; PRODUCT DESIGN; PRODUCT DEVELOPMENT; SENSORS;

NONLINEAR ELASTIC RESONATORS; NONLINEAR ELECTRIC FORCES;

MICROELECTROMECHANICAL DEVICES;

EID: 1842681609     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2003/vib-48517     Document Type: Conference Paper

References (12)

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