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Volumn 5 B, Issue , 2003, Pages 1779-1787

Pull-in dynamics of an elastic beam actuated by distributed electrostatic force

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTRIC POTENTIAL; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; GYROSCOPES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE;

EID: 1842731821     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2003/vib-48518     Document Type: Conference Paper
Times cited : (9)

References (19)
  • 1
    • 0031168990 scopus 로고    scopus 로고
    • M-Test: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures
    • Ostenberg, P., M., and Senturia, S., D., 1997, "M-Test: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures," J. of MEMS, 6 (2), pp. 107-115.
    • (1997) J. of MEMS , vol.6 , Issue.2 , pp. 107-115
    • Ostenberg, P.M.1    Senturia, S.D.2
  • 3
    • 85041133087 scopus 로고    scopus 로고
    • Bifurcation of Equilibria in Micromachined Elastic Structures with Electrostatic Actuation
    • Wang, P., 2001, "Bifurcation of Equilibria in Micromachined Elastic Structures with Electrostatic Actuation," Int. J. Bifurcation & Chaos in Appl. Science and Eng., 11(2), pp. 469-82.
    • (2001) Int. J. Bifurcation & Chaos in Appl. Science and Eng. , vol.11 , Issue.2 , pp. 469-482
    • Wang, P.1
  • 4
    • 0036772611 scopus 로고    scopus 로고
    • An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices
    • Bochobza-Degani, O., Elata, D., and Nemirovsky, Y., 2002, "An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS Devices," J. of MEMS, 11(5), pp. 612-620.
    • (2002) J. of MEMS , vol.11 , Issue.5 , pp. 612-620
    • Bochobza-Degani, O.1    Elata, D.2    Nemirovsky, Y.3
  • 6
    • 1342337622 scopus 로고    scopus 로고
    • Chaotic Motion in a Micor-Electro-Mechanical System with Non-linearity from Capacitors
    • Luo, A., C., J., and Wang, F., Y., 2002, "Chaotic Motion in a Micor-Electro-Mechanical System with Non-linearity from Capacitors," Communications in Nonlinear Science and Numerical Simulation, 7, pp. 31-49.
    • (2002) Communications in Nonlinear Science and Numerical Simulation , vol.7 , pp. 31-49
    • Luo, A.C.J.1    Wang, F.Y.2
  • 7
    • 0033692191 scopus 로고    scopus 로고
    • Computer-Aided Generation of Nonlinear Reduced-Order Dynamic Macromodels-II: Stress-Stiffened Case
    • Gabbay, L., D., Mehner, J., E., and Senturia, S., D., 2000, "Computer-Aided Generation of Nonlinear Reduced-Order Dynamic Macromodels-II: Stress-Stiffened Case," J. of MEMS, 9(2), pp. 270-278.
    • (2000) J. of MEMS , vol.9 , Issue.2 , pp. 270-278
    • Gabbay, L.D.1    Mehner, J.E.2    Senturia, S.D.3
  • 8
    • 0036851112 scopus 로고    scopus 로고
    • Characterization of the Mechanical Behavior of an Electrically Actuated Microbeam
    • Abdel-Rahman, E., M., Younis, M., I., and Nayfeh, A., H., 2002, "Characterization of the Mechanical Behavior of an Electrically Actuated Microbeam," J. Micromech. Microeng., 12(6), pp. 759-766.
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.6 , pp. 759-766
    • Abdel-Rahman, E.M.1    Younis, M.I.2    Nayfeh, A.H.3
  • 9
    • 0036600512 scopus 로고    scopus 로고
    • A Dynamic Model, Including Contact Bounce, of an Electrostatically Actuated Microswitch
    • McCarthy, B., Adams, G., G., McGruer, N., E., and Potter, D., 2002, "A Dynamic Model, Including Contact Bounce, of an Electrostatically Actuated Microswitch," J. of MEMS, 11(3), pp. 276-283.
    • (2002) J. of MEMS , vol.11 , Issue.3 , pp. 276-283
    • McCarthy, B.1    Adams, G.G.2    McGruer, N.E.3    Potter, D.4
  • 10
    • 0033068262 scopus 로고    scopus 로고
    • Theory and Simulation of Viscous Damped Reflection Phase Gratings
    • Furlani, E., P., 1999, "Theory and Simulation of Viscous Damped Reflection Phase Gratings," Physica D, 32, pp. 412-416.
    • (1999) Physica D , vol.32 , pp. 412-416
    • Furlani, E.P.1
  • 12
    • 0032163224 scopus 로고    scopus 로고
    • Squeeze Film Damping Effects on the Dynamic Response of a MEMS Torsion Mirror
    • Pan, F., Kubby, J., Peters, E., Tran, A., T., and Mucherjee, S., 1998, "Squeeze Film Damping Effects on the Dynamic Response of a MEMS Torsion Mirror," J. Micromech. Microeng., 8(3), pp. 200-208.
    • (1998) J. Micromech. Microeng. , vol.8 , Issue.3 , pp. 200-208
    • Pan, F.1    Kubby, J.2    Peters, E.3    Tran, A.T.4    Mucherjee, S.5
  • 13
    • 0036732304 scopus 로고    scopus 로고
    • Squeeze Film Damping Effect on a MEMS Torsion Mirror
    • Chang, K., M., Lee, S., C., and Li, S., H., 2002, "Squeeze Film Damping Effect on a MEMS Torsion Mirror," J. Micromech. Microeng., 12(5), pp. 556-561.
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.5 , pp. 556-561
    • Chang, K.M.1    Lee, S.C.2    Li, S.H.3
  • 14
    • 0030717786 scopus 로고    scopus 로고
    • Pull-in Dynamics as a Measure of the Ambient Pressure
    • IEEE, Piscataway, NJ, USA
    • Gupta, K., G., and Senturia, S., D., 1997, "Pull-in Dynamics as a Measure of the Ambient Pressure," Proc. IEEE Micro Electro Mechanical Systems, IEEE, Piscataway, NJ, USA, pp. 290-294.
    • (1997) Proc. IEEE Micro Electro Mechanical Systems , pp. 290-294
    • Gupta, K.G.1    Senturia, S.D.2
  • 15
    • 0000033761 scopus 로고
    • Natural Frequencies of a Uniform Cantilever With a Tip Mass Slender in the Axial Direction
    • Bhat, B., R., and Wagner, H., 1976, "Natural Frequencies of a Uniform Cantilever With a Tip Mass Slender in the Axial Direction," J. Sound & Vibration, 45(2), pp. 304-307.
    • (1976) J. Sound & Vibration , vol.45 , Issue.2 , pp. 304-307
    • Bhat, B.R.1    Wagner, H.2
  • 16
    • 0036646594 scopus 로고    scopus 로고
    • Pull-in Voltage Analysis of Electrostatically Actuated Beam Structures with Fixed-Fixed and Fixed-Free End Conditions
    • Pamidighantam, S., Puers, R., Baert, K., and Tilmans, H. A. C., 2002, "Pull-in Voltage Analysis of Electrostatically Actuated Beam Structures with Fixed-Fixed and Fixed-Free End Conditions," J. Micromech. Microeng., 12(4), pp. 458-64.
    • (2002) J. Micromech. Microeng. , vol.12 , Issue.4 , pp. 458-464
    • Pamidighantam, S.1    Puers, R.2    Baert, K.3    Tilmans, H.A.C.4
  • 17
  • 18
    • 0035441291 scopus 로고    scopus 로고
    • Effect of Specimen Size on Young's Modulus and Fracture Strength of Polysilicon
    • Sharpe, W., N., Jackson, K., M., Hemker, K., J., and Xie, Z., 2001, "Effect of Specimen Size on Young's Modulus and Fracture Strength of Polysilicon," J. of MEMS, 10(3), pp. 317-326.
    • (2001) J. of MEMS , vol.10 , Issue.3 , pp. 317-326
    • Sharpe, W.N.1    Jackson, K.M.2    Hemker, K.J.3    Xie, Z.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.