Thermal-fluid MEMS devices: A decade of progress and challenges ahead

Journal of Heat Transfer

Volumn 128, Issue 11, 2006, Pages 1221-1233

  Hassan, Ibrahim ^a  

^a Civil and Environmental Engineering   (Canada)

Author keywords

Experimental techniques; Microchannels; Microengines; Microheat sinks; Micromixers; Micropumps; Microsensors; Microturbines; Thermal MEMS

Indexed keywords

FLOW OF FLUIDS; HEAT SINKS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PUMPS; TURBINES;

MICROCHANNELS; MICROENGINES; MICROHEAT SINKS; MICROMIXERS; MICROPUMPS; MICROTURBINES; THERMAL MICROELECTROMECHANICAL SYSTEMS;

HEAT TRANSFER;

FLOW OF FLUIDS; HEAT SINKS; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PUMPS; TURBINES;

EID: 33846309605     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2352792     Document Type: Review

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