Design, fabrication and testing of the P3 micro heat engine

Sensors and Actuators, A: Physical

Volumn 104, Issue 3, 2003, Pages 290-298

  Whalen, S ^a   Thompson, M ^a   Bahr, D ^a   Richards, C ^a   Richards, R ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

MEMS power; Micro heat engine; Piezoelectric membrane

Indexed keywords

ELECTRIC GENERATORS; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; THERMAL CYCLING; THERMODYNAMICS; THIN FILMS;

EXTERNAL COMBUSTION ENGINE; MECHANICAL POWER CONVERSION; MICRO HEAT ENGINE; PIEZOELECTRIC MEMBRANE GENERATOR;

HEAT ENGINES;

EID: 0038392898     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00032-3     Document Type: Article

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