Integrated liquid mixer/valve

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 295-302

  Voldman, Joel ^a   Gray, Martha L ^a   Schmidt, Martin A ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; EXTRACTION; FLUORESCENCE; MICROMACHINING; MICROSCOPIC EXAMINATION; MIXING; PH EFFECTS; REACTIVE ION ETCHING; SILICON WAFERS;

BIOSCIENCE ANALYSIS SYSTEMS; FLUORESCENCE MICROSCOPY; WAFER-BONDED CANTILEVER PLATE FLAPPERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034270240     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870054     Document Type: Article

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