Design and analysis of a surface micromachined spiral-channel viscous pump

Journal of Fluids Engineering, Transactions of the ASME

Volumn 125, Issue 2, 2003, Pages 339-344

  Kilani, Mohammad I ^a,c   Galambos, Paul C ^b   Haik, Yousef S ^d   Chen, Ching Jen ^a  

^a FAMU FSU COLLEGE OF ENGINEERING   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c UNIVERSITY OF JORDAN   (Jordan)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NAVIER STOKES EQUATIONS; POLYSILICON; REYNOLDS NUMBER; VISCOSITY;

VISCOUS SPIRAL MICROPUMPS;

VISCOUS FLOW;

EID: 0344088273     PISSN: 00982202     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1524582     Document Type: Article

References (7)

1. Sen, M., Wajerski, D., and Gad-El-Hak, M., 1996, "A Novel Pump for MEMS Applications," ASME J. Fluids Eng., 118, pp. 624-627.
2. Sharachandra, M. C., Sen, M., and Gad-Elhak, M., 1997, "Navier-Stokes Simulations of a Novel Viscous Pump," ASME J. Fluids Eng., 119, pp. 372-382.
3. Day, R., and Stone, H., 2000, "Lubrication Analysis and Boundary Integral Simulations of a Viscous Micropump," J. Fluid Mech., 416, pp. 197-216.
4. Garcia, E., and Sniegowski, J., 1995, "Surface Micromachined Microengines," Sens. Actuators, 48, pp. 203-214.
5. Dean, W. R., 1927, "Note on the Motion of Fluid in a Curved Pipe," Philos. Mag., 4, pp. 208-219.
6. Leal, L. G., 1992, Laminar Flow and Convective Transport Processes: Scaling Principles and Asymptotic Analysis, Butterworth-Heinemann, Boston, MA.
7. Batchelor, G. K., 1967, An Introduction to Fluid Dynamics, Cambridge University Press, Cambridge, UK.