Micromachined diffuser/nozzle elements for valve-less pumps

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 378-383

  Olsson, Anders ^a   Stemme, Goran ^a   Stemme, Erik ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ETCHING; MICROMACHINING; NOZZLES; PRESSURE DROP; PUMPS; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON;

ANISOTROPIC ETCHING; ANODIC BONDING; DIFFUSER ELEMENTS; ISOTROPIC ETCHING; MICROPUMPS;

DIFFUSERS (FLUID);

EID: 0029752065     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)