Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Sensors and Actuators, A: Physical

Volumn 133, Issue 1, 2007, Pages 35-44

  Duval, Fabrice F C ^a   Wilson, Stephen A ^a   Ensell, Graham ^b   Evanno, Nicolas M P ^c   Cain, Markys G ^d   Whatmore, Roger W ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b Innos Ltd   (United Kingdom)

^c ROLLS ROYCE PLC   (United Kingdom)

^d NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Blocking force; Cantilevers; Force sensors; PZT; Vibrometry

Indexed keywords

FORCE MEASUREMENT; PIEZOELECTRIC DEVICES; SENSORS; SILICON; THIN FILMS;

BLOCKING FORCE; CANTILEVERS; FORCE SENSORS; VIBROMETRY;

MICROACTUATORS;

EID: 33845703140     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.035     Document Type: Article

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