Micromachined piezoelectric ultrasonic imaging transducer

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 95-98

  Mohamed, H ^a   Polla, D ^a   Ebbini, E ^a   Zurn, S ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC TRANSDUCERS; CROSSTALK; DEPOSITION; ELECTROMECHANICAL DEVICES; FABRICATION; FILM THICKNESS; IMAGING SYSTEMS; IMPULSE RESPONSE; MEMBRANES; MEMS; MICROMECHANICS; MODAL ANALYSIS; ORGANOMETALLICS; PIEZOELECTRICITY; REACTIVE ION ETCHING; SILICON NITRIDE; STRUCTURAL DESIGN; THIN FILMS; ULTRASONIC IMAGING; ULTRASONIC TRANSDUCERS;

DEEP REACTIVE ION ETCHING; DIELECTRIC CONSTANTS (K); IMPEDANCE CHARACTERISTICS; LEAD ZIRCONIUM TITANATE; METAL ORGANIC DEPOSITION; MICROFABRICATION PROCESS; THIN FILM PZT MEMBRANES; TWO-DIMENSIONAL ARRAYS;

TRANSDUCERS;

EID: 79953041438     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992751     Document Type: Conference Paper

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