Low-cost deflection measurement for rapid characterization of microelectromechanical systems (MEMS)

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn 1, Issue , 2003, Pages 499-502

  Firebaugh, Samara L ^a   Charles Jr , Harry K ^b   Edwards, Richard L ^b   Keeney, Allen C ^b   Wilderson, Samuel F ^b  

^a UNITED STATES NAVAL ACADEMY   (United States)

^b JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CALIBRATION; FIBER OPTIC SENSORS; INTERFEROMETRY; LINEAR SYSTEMS; MICROWAVES; VISUALIZATION; ELECTRIC POTENTIAL; ELECTROMECHANICAL DEVICES; ELECTRONIC EQUIPMENT TESTING; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; OPTICAL FIBERS; OPTICAL SENSORS;

DEFLECTION MEASUREMENTS;

MICROELECTROMECHANICAL DEVICES; DISPLACEMENT MEASUREMENT;

DEFLECTION MEASUREMENT; FIBER OPTIC DISPLACEMENT SENSOR; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMECHANICAL DEVICE; NON-INTRUSIVE MEASUREMENTS; OPTICAL FIBER SENSOR; SENSOR SYSTEMS; SYSTEM TESTING;

EID: 0037493762     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)

1. J. J. Yao, "RF MEMS from a device perspective," J. Micromech. Microeng., vol. 10, pp. R9-R38, 2000.
2. E. R. Brown, "RF-MEMS switches for reconfigurable integrated circuits," IEEE Trans. Microw. Theory Tech., vol. 46, pp. 1868-1880, 1998.
3. M. Kim, J. B. Hacker, R. E. Mihailovich, and J. F. DeNatale, "A DC-to-40 GHz four-bit RF MEMS true-time delay network," IEEE Microw. Wirel. Comp. Lett., vol. 11, pp. 56-58, 2001.
4. A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke, and C. L. Goldsmith, "X-band RF MEMS phase shifters for phased array applications," IEEE Microw. Guided Wave Lett., vol. 9, pp. 517-519, 1999.
5. D. J. Bishop, C. R. Giles, and G. P. Austin, "The Lucent LambdaRouter: MEMS technology of the future here today," IEEE Communications Magazine, pp. 75-79, 2002.
6. P. B. Chu, S.-S. Lee, and S. Park, "MEMS: The path to large optical crossconnects," IEEE Communications Magazine, pp. 80-87, 2002.
7. P. De Dobbelaere, K. Falta, L. Fan, S. Gloeckner, and S. Patra, "Digital MEMS for optical switching," IEEE Communications Magazine, pp. 88-95, 2002.
8. P. R. Scheeper, A. G. H. v. d. Donk, W. Olthuis, and P. Bergveld, "A review of silicon microphones," Sens. & Act. A, vol. 44, pp. 1-11, 1994.
9. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors," Proceedings of the IEEE, vol. 86, pp. 1640-1659, 1998.
10. J. D. Hall, N. E. Apperson, B. T. Crazier, C. Xu, R. F. Richards, D. F. Bahr, and C. D. Richards, "A facility for characterizing the dynamic mechanical behavior of thin membranes for microelectromechanical systems," Rev. Sci. Instrum., vol. 73, pp. 2067-2072, 2002.
11. R. Schnitzer, N. Rümmler, V. Großer, and B. Michel, "Vibration measurement of microstructures by means of laseroptical modal analysis," presented at EUROPTO Conference on Microsystems Metrology and Inspection, Munich, Germany, 1999.
12. A. Bosseboeuf, J. P. Gilles, K. Danaie, R. Yahiaoui, M. Dupeux, J. P. Puissant, A. Chabrier, F. Fort, and P. Coste, "A versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices," presented at EUROPTO Conference on Microsystems Metrology and Inspection, Munich, Germany, 1999.
13. C. J. Tay, C. Quan, H. Wang, H. M. Shang, and K. C. Chan, "Measurement of a microphone membrane deflection profile using an optical fibre and wedge fringe projection," Meas. Sci. Technol., vol. 12, pp. 320-326, 2001.
14. K. A. Honer, N. I. Maluf, E. Martinez, and O. T. A. Kovacs, "Characterizing deflectable microstructures via a high-resolution laser-based measurement system," Sens. & Act. A, vol. 52, pp. 12-17, 1996.
15. D. F. L. Jenkins, M. J. Cunningham, W. W. Clegge, and M. M. Bakush, "Measurement of the modal shapes of inhomogeneous cantilevers using optical beam deflection," Meas. Sci. Technol., vol. 6, pp. 160-166, 1995.
16. Y. Nemirovsky and O. Bochobza-Degani, "A methodology and model for the pull-in parameters of electrostatic actuators," J. Micromech. Syst., vol. 10, pp. 601-615, 2001.
17. F. Yang, "Electromechanical instability of microscale structures, " J. Appl. Phys., vol. 92, pp. 2789-2794, 2002.
18. E. Cretu, L. A. Rocha, and R. F. Wolffenbuttel, "Micromechanical voltage reference using the pull-in of a beam," IEEE Trans. Instrum. Meas., vol. 50, pp. 1504-1507, 2001.
19. R. F. Wolffenbuttel and C. J. van Mullem, "The relationship between microsystem technology and metrology," IEEE Trans. Instrum. Meas., vol. 30, pp. 1469-1474, 2001.
20. P. M. Osterberg and S. D. Senturia, "M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures," J. Micromech. Syst., vol. 6, pp. 107-118, 1997.
21. Philtec, Inc., 1021 St. Margeret's Ave., Annapolis, MD, (410)757-4404, http://www.philtec.com.
22. Polytec PI, Inc., 23 Midstate Drive, Suite 212, Auburn, MA, (508)832-3456, http://www.polytecpi.com.