Highly (002)-oriented ZnO film grown by ultrasonic spray pyrolysis on ZnO-seeded Si (100) substrate

Journal of Materials Research

Volumn 21, Issue 9, 2006, Pages 2185-2190

  Zhao, Jun Liang ^a,b   Li, Xiao Min ^a   Zhang, Sam ^c   Yang, Chang ^a,b   Gao, Xiang Dong ^a   Yu, Wei Dong ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; MORPHOLOGY; PHOTOLUMINESCENCE; PULSED LASER DEPOSITION; PYROLYSIS; ULTRASONIC APPLICATIONS; ZINC OXIDE;

COLUMNAR MICROSTRUCTURE; HALL MOBILITY; ULTRASONIC SPRAY PYROLYSIS;

FILM GROWTH;

EID: 33845681962     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2006.0291     Document Type: Article

References (24)

1. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner: Recent progress in processing and properties of ZnO. Prog. Mater. Sci. 50, 293 (2005).
2. D.P. Norton, Y.W. Heo, M.P. Ivill, K. Ip, S.J. Pearton, M.F. Chisholm, and T. Steiner: ZnO: Growth, doping and processing. Mater. Today 7, 34 (2004).
3. D.C. Look and B. Claflin: P-type doping and devices based on ZnO. Phys. Status Solidi 241, 624 (2004).
4. R.F. Service: Will UV lasers beat the blues? Science 276, 895 (1997).
5. A. Tsukazaki, A. Ohtomo, T. Onuma, M. Ohtani, T. Makino, M. Sumiya, K. Ohtani, S.F. Chichibu, S. Fuke, Y. Segawa, H. Ohno, H. Koinuma, and M. Kawasaki: Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO. Nat. Mater. 4, 42 (2005).
6. M. Joseph, H. Tabata, H. Saeki, K. Ueda, and T. Kawai: Fabrication of the low-resistive p-type ZnO by codoping method. Physica B (Amsterdam) 302-303, 140 (2001).
7. J.L. Zhao, X.M. Li, J.M. Bian, W.D. Yu, and X.D. Gao: Structural, optical and electrical properties of ZnO films grown by pulsed laser deposition (PLD). J. Cryst. Growth 276, 507 (2005).
8. J.F. Rommeluere, L. Svob, F. Jomard, J. Mimila-Arroyo, A. Lusson, V. Sallet, and Y. Marfaing: Electrical activity of nitrogen acceptors in ZnO films grown by metalorganic vapor phase epitaxy. Appl. Phys. Lett. 83, 287 (2003).
9. 4/Si by radio-frequency magnetron sputtering. Appl. Phys. Lett. 84, 5040 (2004).
10. T.M. Barnes, K. Olson, and C.A. Wolden: On the formation and stability of p-type conductivity in nitrogen-doped zinc oxide. Appl. Phys. Lett. 86, 112112 (2005).
11. G.K. Paul and S.K. Sen: Sol-gel preparation, characterization and studies on electrical and thermoelectrical properties of gallium doped zinc oxide films. Mater. Lett. 57, 742 (2002).
12. F. Paraguay, W. Estrada, D.R. Acosta, E. Andrade, and M. Miki-Yoshiba: Growth, structure and optical characterization of high quality ZnO thin films obtained by spray pyrolysis. Thin Solid Films 350, 192 (1999).
13. J.M. Bian, X.M. Li, X.D. Gao, W.D. Yu, and L.D. Chen: Deposition and electrical properties of N-In codoped p-type ZnO films by ultrasonic spray pyrolysis. Appl. Phys. Lett. 84, 541 (2004).
14. C.Y. Zhang, X.M. Li, J.M. Bian, W.D. Yu, and X.D. Gao: Structural and electrical properties of nitrogen and aluminum codoped p-type ZnO films. Solid State Commun. 132, 75 (2004).
15. J.L. Zhao, X.M. Li, J.M. Bian, W.D. Yu, and C.Y. Zhang: Growth mechanism for N-doped ZnO film grown by spray pyrolysis method. J. Cryst. Growth 280, 495 (2005).
16. E. Mirica, G. Kowach, P. Evans, and H. Du: Morphological evolution of ZnO thin films deposited by reactive sputtering. Cryst. Growth Des. 4, 147 (2004).
17. P.B. Barna and M. Adamik: Science and Technology of Thin Films (World Scientific Publishing Co. Pte. Ltd., Singapore, 1995), p. 1.
18. E. Ziegler, A. Heinrich, H. Oppermann, and G. Stover: Electrical properties and non-stoichiometry in ZnO single crystals. Phys. Status Solidi A 66, 635 (1981).
19. D.C. Look, J.W. Hemsky, and J.R. Sizelove: Residual native shallow donor in ZnO. Phys. Rev. Lett. 82, 2552 (1999).
20. C.G. Van de Walle: Hydrogen as a cause of doping in zinc oxide. Phys. Rev. Lett. 85, 1012 (2000).
21. L.Y. Chen, W.H. Chen, J.J. Wang, F.C.N. Hong, and Y.K. Su: Hydrogen-doped high conductivity ZnO films deposited by radio-frequency magnetron sputtering. Appl. Phys. Lett. 85, 5628 (2004).
22. K. Vanheusden, W.L. Warren, C.H. Seager, D.R. Tallant, J.A. Voigt, and B.E. Gnade: Mechanisms behind green photoluminescence in ZnO phosphor powders. J. Appl. Phys. 79, 7983 (1996).
23. Y. Ma, G.T. Du, S.R. Yang, Z.T. Li, B.J. Zhao, X.T. Yang, T.P. Yang, Y.T. Zhang, and D.L. Liu: Control of conductivity type in undoped ZnO thin films grown by metalorganic vapor phase epitaxy. J. Appl. Phys. 95, 6268 (2004).
24. T. Matsumoto, H. Kato, K. Miyamoto, M. Sano, and E.A. Zhukov: Correlation between grain size and optical properties in zinc oxide thin films. Appl. Phys. Lett. 81, 1231 (2002).