Coupled micromechanical drumhead resonators with practical application as electromechanical bandpass filters

Journal of Micromechanics and Microengineering

Volumn 12, Issue 6, 2002, Pages 925-938

  Greywall, Dennis S ^a   Busch, Paul A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; ETCHING; LIGHT INTERFERENCE; MATHEMATICAL MODELS; RESONATORS; SILICON NITRIDE; THIN FILMS;

ELECTROMECHANICAL BANDPASS FILTERS; MICROMECHANICAL RESONATORS; WET ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036851066     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/6/325     Document Type: Article

References (7)

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3. Greywall D S 1999 Micromechanical RF filters excited by the Lorentz force J. Micromech. Microeng. 9 78-84
4. Cleland A N and Roukes M L 1996 Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals Appl. Phys. Lett. 69 2653-5
5. Kinsler L E, Frey A R, Coppens A B and Sanders J V 1982 Fundamentals of Acoustics (New York: Wiley)
6. Greywall D S 1999 Phenomenological model of gas-damping of micromechanical structures Sensors Actuators 72 49-70
7. Graebner J E, Barber B P, Gammel P L and Greywall D S 2001 Dynamic visualization of subangstrom high-frequency surface vibrations Appl. Phys. Lett. 78 159-61