-
2
-
-
0001682415
-
-
S.W. King, J.P. Barnak, M.D. Bremser, K.M. Tracy, C. Ronning, R.F. Davis, R.J. Nemanich, J. Appl. Phys. 84, 5248 (1998).
-
(1998)
J. Appl. Phys.
, vol.84
, pp. 5248
-
-
King, S.W.1
Barnak, J.P.2
Bremser, M.D.3
Tracy, K.M.4
Ronning, C.5
Davis, R.F.6
Nemanich, R.J.7
-
3
-
-
5344279152
-
-
C.B. Vartuli, S.J. Pearton, C.R. Abernathy, J.D. MacKenzie, E.S. Lambers, J.C. Zolper, J. Vac. Sci. & Techn. B 14, 3523 (1996).
-
(1996)
J. Vac. Sci. & Techn. B
, vol.14
, pp. 3523
-
-
Vartuli, C.B.1
Pearton, S.J.2
Abernathy, C.R.3
MacKenzie, J.D.4
Lambers, E.S.5
Zolper, J.C.6
-
5
-
-
0343546070
-
-
J.H. Edgar (ed.), London, INSPEC
-
J.H. Edgar (ed.), Group III Nitrides, London, INSPEC (1994).
-
(1994)
Group III Nitrides
-
-
-
6
-
-
0030713471
-
-
J.C. Zolper, S.J. Pearton, J.S. Williams, H.H. Tan, R.J. Karlicek, R.A. Stall, Mater. Res. Soc. Proc. Vol. 449,981 (1997).
-
(1997)
Mater. Res. Soc. Proc.
, vol.449
, pp. 981
-
-
Zolper, J.C.1
Pearton, S.J.2
Williams, J.S.3
Tan, H.H.4
Karlicek, R.J.5
Stall, R.A.6
-
7
-
-
0000841774
-
-
H.H. Tan, J.S. Williams, J. Zou, D.J.H. Cockayne, S.J. Pearton, J.C. Zolper, R.A. Stall, Appl. Phys. Lett. 72, 1190 (1998).
-
(1998)
Appl. Phys. Lett.
, vol.72
, pp. 1190
-
-
Tan, H.H.1
Williams, J.S.2
Zou, J.3
Cockayne, D.J.H.4
Pearton, S.J.5
Zolper, J.C.6
Stall, R.A.7
-
8
-
-
0029748469
-
-
S. Strite, P.W. Epperlein, A. Dommann, A. Rocke, R.F. Broom, Mater. Res. Soc. Proc. Vol. 395, 795 (1996).
-
(1996)
Mater. Res. Soc. Proc.
, vol.395
, pp. 795
-
-
Strite, S.1
Epperlein, P.W.2
Dommann, A.3
Rocke, A.4
Broom, R.F.5
-
9
-
-
4043094831
-
-
J. Appl. Phys. 84, 949 (1998)
-
S. Strite, A. Pelzmann, T. Suski, M. Leszczynski, J. Jun, A. Rockett, M. Kamp, K. J. Ebeling, MRS Inter. J. Nitride Res. 2, 15 (1997); J. Appl. Phys. 84, 949 (1998).
-
(1997)
MRS Inter. J. Nitride Res.
, vol.2
, pp. 15
-
-
Strite, S.1
Pelzmann, A.2
Suski, T.3
Leszczynski, M.4
Jun, J.5
Rockett, A.6
Kamp, M.7
Ebeling, K.J.8
-
10
-
-
0030651575
-
-
J.C. Zolper, J. Han, R.M. Biefeld, S.B. van Deusen, W.R. Wampler, S.J. Pearton, J.S. Williams, H.H. Tan, R.J. Karlicek, R.A. Stall, Mater. Res. Soc. Proc. Vol. 468,401 (1998).
-
(1998)
Mater. Res. Soc. Proc.
, vol.468
, pp. 401
-
-
Zolper, J.C.1
Han, J.2
Biefeld, R.M.3
Van Deusen, S.B.4
Wampler, W.R.5
Pearton, S.J.6
Williams, J.S.7
Tan, H.H.8
Karlicek, R.J.9
Stall, R.A.10
-
11
-
-
0033320412
-
-
and MRS Internet J. Nitride Semicond. Res. 4SI, G3.17 (1999).
-
C. Ronning, K.J. Linthicum, E.P. Carlson, P.J. Hartlieb, D.B. Thomson, T. Gehrke, R.F. Davis, Mat. Res. Soc. Symp. Proc. Vol. 537 (1999) and MRS Internet J. Nitride Semicond. Res. 4SI, G3.17 (1999). http://nsr.mij.mrs.org/4Sl/G3.17/
-
(1999)
Mat. Res. Soc. Symp. Proc.
, vol.537
-
-
Ronning, C.1
Linthicum, K.J.2
Carlson, E.P.3
Hartlieb, P.J.4
Thomson, D.B.5
Gehrke, T.6
Davis, R.F.7
-
12
-
-
33751127103
-
-
J. Mat. Res. 11, 1011(1996)
-
T.W. Weeks, Jr., M.D. Bremser, K.S. Ailey, E.P. Carlson, W.G. Perry, R.F. Davis, Appl. Phys. Lett. 67,401 (1995); J. Mat. Res. 11, 1011(1996).
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 401
-
-
Weeks, T.W.1
Bremser, M.D.2
Ailey, K.S.3
Carlson, E.P.4
Perry, W.G.5
Davis, R.F.6
-
13
-
-
0003412161
-
-
Pergamon Press, New York
-
J.F. Ziegler, J.P. Biersack, and U. Littmark, The stopping and ranges of ions in solids, (Pergamon Press, New York, 1985).
-
(1985)
The Stopping and Ranges of Ions in Solids
-
-
Ziegler, J.F.1
Biersack, J.P.2
Littmark, U.3
-
14
-
-
0001449046
-
-
S. A. Smith, C. A. Wolden, M. D. Bremser, A. D. Hanser, R. F. Davis, W. V. Lampert, Appl. Phys. Lett. 71, 3631 (1997).
-
(1997)
Appl. Phys. Lett.
, vol.71
, pp. 3631
-
-
Smith, S.A.1
Wolden, C.A.2
Bremser, M.D.3
Hanser, A.D.4
Davis, R.F.5
Lampert, W.V.6
-
16
-
-
0031384169
-
-
M. Dalmer, M. Restle, A. Stolzier, U. Vetter, H. Hofsäss, M.D. Bremser, C. Ronning, R.F. Davis, Mat. Res. Soc. Proc. Vol. 482, 1021 (1998).
-
(1998)
Mat. Res. Soc. Proc.
, vol.482
, pp. 1021
-
-
Dalmer, M.1
Restle, M.2
Stolzier, A.3
Vetter, U.4
Hofsäss, H.5
Bremser, M.D.6
Ronning, C.7
Davis, R.F.8
-
18
-
-
0343419620
-
-
B.J. Pong, C.J. Pan, Y.C. Teng, G.G. Chi, W.H. Li, K.C. Lee, C.H. Lee, J. Appl. Phys. 83,5992 (1998).
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 5992
-
-
Pong, B.J.1
Pan, C.J.2
Teng, Y.C.3
Chi, G.G.4
Li, W.H.5
Lee, K.C.6
Lee, C.H.7
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