2D photonic crystals fabricated in wide bandgap nanocrystalline diamond

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6002, Issue , 2005, Pages

  Baldwin, Jeffrey W ^a   Zalalutdinov, Maxim ^b   Butler, James E ^a   Feygelson, Tatyana ^c   Houston, Brian H ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

^c SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

CVD nanocrystalline diamond; Mass sensing; Nanofabrication; Nanomechanical resonator; Optical waveguide; Photonic crystal

Indexed keywords

CVD NANOCRYSTALLINE DIAMOND; MASS SENSING; NANOMECHANICAL RESONATOR; PHOTONIC CRYSTAL;

CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTRON BEAM LITHOGRAPHY; MECHANICAL PROPERTIES; NANOTECHNOLOGY; OPTICAL WAVEGUIDES; PHOTONS; REFRACTIVE INDEX; THIN FILMS;

SINGLE CRYSTALS;

EID: 33644660213     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.631871     Document Type: Conference Paper

References (13)

1. N. Carlsson, N. Ikeda, Y. Sugimoto, K. Asakawa, T. Takemori, Y. Katayama, N. Kawai, K. Inoue, Opt. Quantum Electron. 34, 123 (2002).
2. J.N. Winn, Y. Fink, S. Fan, J.D. Joannopoulos, Opt. Lett. 23, 1573 (1998).
3. E. Chow, S.Y. Lin, J.R. Wendt, S.G. Johnson, J.D. Joannopoulos, Opt. Lett. 26, 286 (2001).
4. M. Loncar, A. Scherer, Y. Qiu, Appl. Phys. Lett. B2, 4648 (2003).
5. K.L. Ekinci, X.M.H. Huang, M.L. Roukes, Appl. Phys. Lett. 84 4469 (2004)
6. J. Philip, P. Hess, T. Feygelson, J.E. Butler, S. Chattopadhyay, K.H. Chen, L.C. Chen, J. Appl. Phys. 93, 2164 (2003).
7. J.F. Vignola, J. Jarzynski, B.H. Houston, M. Zalalutdinov, J.W. Baldwin, J.A. Judge, submitted to Appl. Phys. Lett.
8. H. Namatsu, Y. Takahashi, K.Yamazaki, T. Yamaguchi, M. Nagase, K. Kurihara, J. Vac. Sci. Technol. B, 16, 69 (1998).
9. F.C.M.J.M van Delft, J.P. Weterings, A.K. van Langen-Suurling, H.J. Romijn, J. Vac. Sci. Technol. B 18, 3419 (2000).
10. M. Zalalutdinov, K. L. Aubin, R. B. Reichenbach, A. T.Zehnder, B. H. Houston, J. M. Parpia, and H. G. Craighead, Appl. Phys. Lett. 83, 3815 (2003).
11. M. Zalalutdinov, K. L. Aubin, C. Michael, R. B. Reichenbach, A. T. Zehnder, B. H. Houston, J. M. Parpia, H. G. Craighead, Proceedings of the SPIE - The International Society for Optical Engineering vol.5116: 229-36, 2003.
12. S. G. Johnson and J. D. Joannopoulos, Opt. Express 8, 173 (2001).
13. D.S.Y. Hsu, C.S. Kim, C.R. Eddy, R.T. Hohn, R.L. Henry, J.A. Casey, V.A. Shamamian, A. Rosenberg, J. Vac. Sci. and Technol. B. 23, 1611 (2005).