Fabrication of short-wavelength photonic crystals in wide-band-gap nanocrystalline diamond films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 50-54

  Baldwin, Jeffrey W ^a   Zalalutdinov, Maxim ^b   Feygelson, Tatyana ^c   Butler, James E ^a   Houston, Brian H ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SFA INC   (United States)

^c SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP SUBMICRON FEATURE SIZES; PHOTONIC CRYSTALS; POLYCRYSTALLINE FILMS;

CHROMIUM; DIAMOND FILMS; ELECTRON BEAM LITHOGRAPHY; ETCHING; EVAPORATION; FABRICATION; NANOSTRUCTURED MATERIALS; SINGLE CRYSTALS;

PHOTONS;

EID: 31544448058     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2138722     Document Type: Article

References (12)

1. N. Carlsson, N. Ikeda, Y. Sugimoto, K. Asakawa, T. Takemori, Y. Katayama, N. Kawai, and K. Inoue, Opt. Quantum Electron. 34, 123 (2002).
2. A. Rosenberg, R. J. Tonucci, and E. A. Bolden, Appl. Phys. Lett. 69, 2638 (1996).
3. E. Chow, S. Y. Lin, J. R. Wendt, S. G. Johnson, and J. D. Joannopoulos, Opt. Lett. 26, 286 (2001).
4. A. Rosenberg, R. J. Tonucci, H.-B. Lin, and A. J. Campillo, Opt. Lett. 21, 830 (1996).
5. J. N. Winn, Y. Fink, S. Fan, and J. D. Joannopoulos, Opt. Lett. 23, 1573 (1998).
6. Y. Fink, J. N. Winn, S. Fan, C. Chen, J. Michel, J. D. Joannopoulos, and E. L. Thomas, Science 282, 1679 (1998).
7. M. Loncar, T. Yoshie, A. Scherer, P. Gogna, and Y. Qui, Appl. Phys. Lett. 81, 2680 (2002).
8. H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, and K. Kurihara, J. Vac. Sci. Technol. B 16, 69 (1998).
9. F. C. M. J. M van Delft, J. P. Weterings, A. K. van Langen-Suurling, and H. J. Romijn, J. Vac. Sci. Technol. B 18, 3419 (2000).
10. J. Philip, P. Hess, T. Feygelson, J. E. Butler, S. Chattopadhyay, K. H. Chen, and L. C. Chen, J. Appl. Phys. 93, 2164 (2003).
11. S. G. Johnson and J. D. Joannopoulos, Opt. Express 8, 173 (2001).
12. D. S. Y. Hsu, C. S. Kim, C. R. Eddy, R. T. Holm, R. L. Henry, J. A. Casey, V. A. Shamamian, and A. Rosenberg, J. Vac. Sci. Technol. B 23, 1611 (2005).