Modeling of a pulsed-power SF6 plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4820-4823

  Meyyappan, M ^a  

^a NASA AMES RESEARCH CENTER   (United States)

Author keywords

Modeling; Production of negative ions; Pulsed power; SF6 plasma

Indexed keywords

ELECTRONS; FLUORINE COMPOUNDS; GLOW DISCHARGES; IONS; MATHEMATICAL MODELS; NEUTRONS; PLASMA DENSITY;

SULFUR HEXAFLUORIDE;

PLASMA THEORY;

EID: 0031176420     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4820     Document Type: Article

References (16)

1. N. Fujiwara, T. Maruyama, M. Yoneda, K. Tsukamoto and T. Banjo: Jpn. J. Appl. Phys. 33 (1994) 2164.
2. N. Fnjiwara, S. Ogino, T. Maruyama and M. Yoneda: Plasma Sources Sci. Technol. 5 (1996) 126.
3. S. Samukawa and T. Mieno: Plasma Sources Sci. Technol. 5 (1996) 132.
4. T. H. Ahn, K. Nakamura and H. Sugai: Plasma Sources Sci. Technol. 5 (1996) 139.
5. S. Ashida, C. Lee and M. A. Liberman: J. Vac. Sci. Technol. A 13 (1995) 2498.
6. M. Meyyappan: J. Vac. Sci. Technol. A 14 (1996) 2122.
7. M. Meyyappan and T. R. Govindan: IEEE Trans. Plasma Sci. 23 (1995) 623.
8. M. Meyyappan and T. R. Govindan: Vacuum 47 (1996) 215.
9. T. Stanski and B. Adamczyk: Int. J. Mass Spectrom. & Ion Phys. 46 (1983) 31.
10. L. E. Kline, D. K. Davies, C. L. Chen and P. J. Chantry: J. Appl. Phys. 50 (1979) 6789.
11. httpi://www.kinonia.com/ kinema, a web site maintained by W. L. Morgan, contains collision cross section data for several gases.
12. L. E. Kline: IEEE Trans. Plasma Sci. 14 (1986) 145.
13. R. J. Van Brunt and J. T. Herron: Physica Scripta 153 (1994) 9.
14. M. Meyyappan and T. R. Govindan: J. Appl. Phys. 80 (1996) 1345.
15. C. C. Tang and D. W. Hess: J. Electrochem. Soc. 131 (1984) 115.
16. B. Smith: personal communication.