Analysis of pulse-time modulated high-density discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2122-2126

  Meyyappan, M ^a  

^a Scientific Research Associates Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030519205     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580090     Document Type: Article

References (17)

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