Models for ALD and MOCVD growth of rare earth oxides

Topics in Applied Physics

Volumn 106, Issue , 2006, Pages 73-86

  Elliott, Simon D ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750817131     PISSN: 03034216     EISSN: 14370859     Source Type: Book Series    
DOI: 10.1007/11499893_5     Document Type: Article

References (28)

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