The chemical vapor deposition of aluminum nitride: Unusual cluster formation in the gas phase

Journal of the American Chemical Society

Volumn 119, Issue 24, 1997, Pages 5668-5678

  Timoshkin, Alexey Y ^a   Bettinger, Holger F ^a   Schaefer III, Henry F ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM DERIVATIVE; ALUMINUM NITRIDE; HYDROCHLORIC ACID; OLIGOMER; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL BOND; CHEMICAL STRUCTURE; DISSOCIATION; ELECTRONICS; GAS; OLIGOMERIZATION; THERMODYNAMICS; VAPOR; VIBRATION;

EID: 0030762050     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja964163s     Document Type: Article

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