Ferroelectric properties of Pt/PbTiO3/PbZr0.3Ti 0.7O3/PbTiO3/Pt integrated capacitors etched in noncrystalline phase

Applied Physics Letters

Volumn 89, Issue 18, 2006, Pages

  Wang, Longhai ^a,b   Yu, Jun ^b   Wen, Xin'Yi ^b   Wang, Yunbo ^b   Gao, Junxiong ^b   Liu, Feng ^c   Wei, Chaogang ^c   Ren, Tianling ^c  

^a WUHAN INSTITUTE OF TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^c TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FERROELECTRICITY; LEAD COMPOUNDS; MAGNETIC HYSTERESIS; MICROANALYSIS; POLARIZATION; REMANENCE; X RAY ANALYSIS;

CAPACITOR ARRAYS; HYSTERESIS LOOP; PIEZORESPONSE FORCE MICROSCOPY; SATURATION POLARIZATION;

CAPACITORS;

EID: 33750728928     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2369628     Document Type: Article

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